He/Ga-scanning microscopy system with SEM

Röntgen复杂材料系统中心(RCCM)成立于2006年7月，由物理与天文学、化学与药学和生物学学院的科学家创建。通过其“联合分析实验室”，它提供了用于材料分析的尖端工具。高质量的纳米结构对于汇聚在纳米尺度上的物理、化学和生命科学领域发挥着越来越重要的决定性作用。在这里，我们请求为一个设施提供资金，该设施将高端多尺度微米和纳米制造和制备以及通过相关显微镜分析纳米结构紧密地结合在一起。这两种能力需要携手合作，以保证纳米结构的最佳性能和较短的优化周期。因此，我们打算通过将多离子聚焦离子束研磨设备(Orion Nanofab，Zeiss)与超高分辨率场发射扫描电子显微镜(Merlin，Zeiss)相结合，实现这两个方面的独特组合。到目前为止，这两种功能还不能集成在一台机器上，然而，相关的显微镜方法和直接的空间邻近将保证两种仪器的无缝结合。特别是，通过氦离子球磨制备的超细纳米结构可以立即用高端扫描电子显微镜进行表征，并在必要时进行调整。该系统将向所有RCCM成员开放。申请者名单代表了RCCM活动的平衡部分。预期的应用包括高端单晶等离子体纳米结构的制备和分析，二维半导体、碳纳米管和自组织功能有机材料的结构和成像，以及生物有机体的高分辨率成像。预计在SFB 1170内的拓扑绝缘子领域将出现进一步的应用。

The Röntgen-Center for Complex Material Systems (RCCM) has been founded in July 2006 by scientists of the faculties of Physics and Astronomy, Chemistry and Pharmacy, and Biology. Via its `Joint Analytical Laboratory´ it provides access to cutting edge tools for material analysis. Nanostructures of high quality are playing a more and more decisive role for the fields of physics, chemistry and life sciences that converge at the nanoscale. Here we request funding for a facility that tightly integrates both high-end multiscale micro- and nanofabrication and preparation as well as analysis of nanostructures by means of correlative microscopy. Both capabilities need to work hand in hand to guarantee best performance of nanostructures and short optimization cycles. We therefore intend to realize a unique combination of both aspects by combining a multi-ion focused ion-beam milling device (Orion Nanofab, Zeiss) with an ultra-high-resolution field-emission scanning electron microscope (Merlin, Zeiss). Both functionalities so far cannot be integrated in a single machine, however, correlative microscopy approaches and direct spatial vicinity will guarantee a seamless combination of both instruments. In particular, extremely fine nanostructures fabricated by He-ion milling can be characterized by high-end SEM immediately and adapted if necessary. The system will be open to all RCCM members. The list of applicants represents a balanced cross section of RCCM activities. Intended applications include fabrication and analysis of high-end single crystal plasmonic nanostructures, structuring and imaging of 2D semiconductors, carbon nanotubes and self-organized functional organic materials, as well as high-resolution imaging of biological organisms. Further applications are expected to arise in the field of topological insulators within the SFB 1170.