Integrated GD-OES/XRF element analyzer (GD-OES = glow discharge optical emission spectroscopy, XRF = X-ray fluorescene)

定量元素分析在物理学、材料科学和工程学的许多领域中起着核心作用。以下是杜伊斯堡-埃森大学申请工作组的典型应用示例：在研究可再生能源的新材料时，必须了解所制造薄膜的厚度和成分，特别是吸收层。为了获得关于器件质量的精确陈述，获得关于深度相关元素分布的信息同样重要，特别是对于多元材料，如白垩石（由AG Schmid研究）或钙钛矿（AG Kirchartz，AG Lupascu，AG Winterr）。对于由多铁性材料制成的磁性异质结构，组成也是决定性的。多相纳米复合材料层，如CoFe 2 O 4/BaTiO 3，目前正在由相关的AG Wende和AG Lupascu小组进行研究。多铁性纳米粒子（AG Wende，AG Lupascu）或基于氮化物和氧化物的纳米粒子（AG Winterer）是一个研究课题，其基于对它们组成的了解。最后，对于掺杂有稀土元素或过渡金属（Cr、Eu、Tb）的氧化物（Al 2 O3、ZrO 2），晶格内掺杂离子的浓度和分布决定了例如热成像性能，并且由AG Atakan分析。同时，应达到低至ppm范围的分辨率。为此，一方面，固体、粉末和必要时液体样品的整体组成值是感兴趣的。另一方面，对于固体样品，特别是薄膜，与深度相关的元素分布是相关的。作为测量方法，可以快速分析高达几微米的深度，测量精度在几ppm的范围内，有两种方法：X射线荧光（XRF）也用于粉末和液体样品的积分值，辉光放电光学发射光谱（GD-OES）用于深度测量。固体样品的解析结果。使用能量色散XRF的测量是非破坏性的，并且可以从元素Na开始。相比之下，GD-OES以研磨的方式测量，但提供了对轻元素如C、O和N的访问。XRF和GD-OES这两种方法的结合可以在最小的精度和非破坏性妥协的情况下实现广泛元素光谱的最佳覆盖。集成版本还有助于交叉校准，以获得可靠的定量值。彻底的校准是有意义的测量的基础，这是预期从拟议的集成GD-OES/XRF元素分析仪。

Quantitative element analysis plays a central role in many fields of physics, material science and engineering. In the following, typical application examples of the applying working groups at the University of Duisburg-Essen are given:When researching novel materials for renewable energies, it is essential to know thicknesses and composition of the fabricated thin films, in particular of the absorber layers. In order to arrive at precise statements about the device quality, it is equally important to obtain information about the depth-dependent element distribution, in particular for multinary materials like chalkoyprites (researched by AG Schmid) or perovskites (AG Kirchartz, AG Lupascu, AG Winterer). Also for magnetic heterostructures made from multiferroic materials the composition is decisive. Multiphase nanocomposite layers like CoFe2O4/BaTiO3 are currently under research by the involved groups AG Wende and AG Lupascu. Nanoparticles of multiferroic nature (AG Wende, AG Lupascu) or based on nitrides and oxides for the application in photocatalysis (AG Winterer) are a subject of research, which basis on the knowledge of their composition. Finally, for oxides (Al2O3, ZrO2) doped with rare earth elements or transition metals (Cr, Eu, Tb) the concentration and distribution of doping ions within the lattice are determining for example the thermographic properties and are analyzed by the AG Atakan.The broadness of the mentioned examples illustrates the necessity of covering a broad spectrum of elements. At the same time, a resolution down to the ppm range shall be reached. For this, on the one hand side the integral composition values of solid, powder and where necessary liquid samples are of interest. On the other hand, for solid samples, in particular thin films, the depth-dependent element distribution is relevant.As measurement methods, which allow a quick analysis over a depth of up to several micrometers with a measurements precision in the range of few ppm, two methods offer themselves: X-ray fluorescence (XRF) for integral values also of powder and liquid samples and glow-discharge optical emission spectroscopy (GD-OES) for depth-resolved results of solid samples. Measurements using energy-dispersive XRF are non-destructive and available starting from the element Na. GD-OES in contrast measures in an abrasive way, but provides access to the light elements like C, O and N. The combination of the two methods XRF and GD-OES allows an optimal coverage of a broad element spectrum under minimal compromises of precision and non-destructiveness. The integrated version additionally facilitates a cross calibration to obtain reliable quantitative values. A thorough calibration is the basis for meaningful measurements, which are expected from the proposed integrated GD-OES/XRF element analyzer.