Study on Electric Field and Electron-Energy Distribution Estimation Using Simultaneous Measurement of Many Spectra Emitted from Electrical Discharge.

提出了一种估算电场、电子温度和电子密度的新方法。基于电子态跃迁模型，从理论上预测了用玻尔兹曼方程描述电子群的放电空间的发射率是电场强度的函数。两种不同的光谱发射强度之比也被确定为电场的函数，并有效地用于估计电场。利用发射速率和测量的发射强度，可以估计电子密度。通过测量氮的电场强度和第二正极系统和第一正极系统的发射率，标定了电子态间的跃迁系数和测量系统的效率。利用该校准方法，可以在10%的精度范围内光谱测定氮辉光放电中的电场和电子密度。利用标定方法将光谱学方法应用于针面间隙辉光放电的测量。结果表明，针尖附近的电场达到1kV/cm/Torr左右。提出了一种有效利用氮第一正系信息测量分子旋转温度的新方法。新方法计算的数值与热扩散方程计算的数值在正柱区10%范围内基本一致。利用氩气作为探测气体，通过测量氩气和氮气的发射强度，估计了电场和电子密度。利用探测气体不仅可以估计平均电子能量，而且可以估计电子能量的分布。

A new useful method for estimating electric field, electron temperature and electron density is developed. The emission rate from a discharge space, in which electron swarm is described by Boltzman equation, is theoretically predicted as a function of electric field strength based on an electronic-state-transition model. The ratio of two different spectral emission intensities is also determined as a function of electric field and is effectively used to estimate the electric field. By using both the emission rate and the measured emission intensity, electron density can be estimated. The calibration of transition coefficients between electronic states and the efficiency of measuring system are made by measuring electric field strength and the emission rate of second positive system and first positive system of nitrogen. Using this calibration method, it is found that electric field and electron density in nitrogen glow discharge can be spectroscopically determined within the accuracy of 10%.The spectroscopic approach using the calibration method is applied to the measurement of a glow discharge in a needle-to-plane gap. The result shows that the electric field near the needle tip reaches around 1kV/cm/Torr.A new method for measuring molecular rotational temperature is proposed, in which the information on first positive system of nitrogen is effectively used. The value estimated by the new method agree with those calculated based on heat diffusion equation within 10% in the positive column region.Using argon gas as a probe gas, electric field and electron density are estimated from the measurements of the emission intensities from both argon and nitrogen. Not only mean electron energy but also electron energy distribution can be estimated by using some probing gases.