Development of a System for Measurement, Analysis and Evaluation of Nano-Dynamics

为了提高用于磁盘记录的静压空气轴承主轴和悬浮滑块轴承的性能，本研究项目旨在开发一套用于测量、分析和评估这些精密机械元件的IS和纳米动力学性能的系统。研究结果如下：(1)比较了三种精密振动计的分辨率和S/噪声比，确定了每种测量应选用哪种振动计.(2)提出了从振动计测量信号中分离主轴振动的不可重复分量和可重复分量的方法。(C)用上述方法对磁盘轴和静压空气轴承主轴的回转精度进行了高精度的测量。(D)最小的三个振型、固有频率和阻尼比可以作为理论预测的…将轴承气膜的润滑分析与刚性转子和轴承的动力学分析相结合，利用有限元分析和实验模态分析相结合的方法，评价了推力板与轴颈螺栓联接对转子振动特性的影响。(F)将基于雷诺方程的气膜润滑分析与有限元分析的主轴转子结构分析相结合，从理论上评估了空气轴承主轴的振动特性。(G)提出了一种旋转空气轴承主轴传递函数的测量方法。建立了一种反分析方法，为飞头滑块的设计提供了一种有效的工具。(I)建立了飞头滑块跟踪特性的频域分析方法。建立了磁头滑块对磁盘表面振动响应特性的测量与评价方法。较少

For improving the performance of a hydrostatic air bearing spindle and a flying slider had bearing for magnetic disk recording, this research project aims at development of a system for measurement, analysis and evaluation of is and evaluation of nano-dynamics of these precise machine elements. The results of this study are as follows.(a) The resolution and S/N of three kinds of precision vibrometers are compared to determine which vibrometers should be used on each measurement.(b) A method of separating the non-repeatable from the repeatable components of the spindle vibrations in the measured signal of vibrometer is proposed. A method of separating the repeatable spindle vibration from the surface irregularity is also proposed.(c) The rotating accuracy of the magnetic disk spindle and the hydrostatic air bearing spindle are measured by using above-discribed method with precision.(d) The lowest three vibration medes, natural frequencies and damping ratioes can be the oretically predic … More ted from the combination of lubrication analysis of bearing air film and dynamics of rigid rotor and bearing.(e) Effects of bolted joints between thrust plates and journal on the vibration characteristics of the rotor can be evaluated by using the FEM and experimental modal analysis.(f) Vibration characteristics of air bearing spindle can be theoretically estimated by coupling the lubrication analysis of air film based on Reynolds equation and the structural analysis of spindle rotor by FEM.(g) A measurement method of transfer function of rotating air bearing spindle is proposed. This method can remove the surface irregularity from the detected response signal.(h) An inverse analysis method is established to provide an efficient tool in designing flying head slider.(i) Frequency domain analysis of the tracking characteristics of flying head slider is formulated. The measurement and evaluation way of response characteristics of flying head slider to disk surface vibration is established. Less