Semi-automatic wafer probe station

半自动晶片探测站是用于半导体传感器的电流-电压特性(IV曲线)和电容-电压曲线(CV曲线)及其特性测量的最先进工具。它们不仅允许非常高的产量，而且还可以在低温下实现非常精确的温度和环境控制，这是半导体研究中许多应用所必需的。所申请的探测站将由多特蒙德理工大学的两个实验粒子物理小组使用。Kröninger教授的工作组参与了实验粒子物理和医学物理的研究项目，目的是在这两个领域之间创造协同效应。目前的研究项目对这种晶片探测站至关重要，包括研究新型ATLAS ITK像素探测器的传感器设计和质量控制措施，以及为未来的实验研究和开发耐辐射硅传感器。在医学物理领域，晶片探针站是研究用于质子治疗的半导体探测器、开发质子照相系统以及使用硅传感器进行电子剂量测量所必需的。Albrecht教授的工作组参与了LHCb实验，并将利用晶片探测站开发束流条件监测器，并为未来的实验研究和开发基于半导体的跟踪探测器，包括LHCb Upgrade II。

Semi-automatic wafer probe stations are the state-of-the-art tool for current-voltage characterization (IV-curves) and capacitance-voltage profiling (CV-curves) of semiconductor sensors and the measurement of their properties. They do not only allow a very high throughput, but also achieve very precise temperature and environmental control at low temperatures necessary for many applications in semiconductor research. The probe station requested will be used by the two experimental particle physics groups of the TU Dortmund University.The working group of Prof. Kröninger is involved in research projects in experimental particle physics and medical physics with the aim to create synergies between these two fields. Current research projects for which such a wafer probe station is crucial include the study of the sensor design and the development of quality control measures for the new ATLAS ITk pixel detector as well as research and development of radiation-hard silicon sensors for future experiments. In the realm of medical physics, the wafer probe station is necessary for the study of semiconductor detectors for proton therapy, the development of a proton radiography system as well as for electronic dosimetry with silicon sensors. The working group of Prof. Albrecht is involved in the LHCb experiment and will use the wafer probe station for the development of a beam condition monitor as well as research and development for semiconductor-based tracking detectors for future experiments, including LHCb upgrade II.