Liquid-vapor structure under boiling bubbles on MEMS heat transfer surfaces during high heat flux boiling

本研究旨在通过实现沸腾现象的最小单元——一对聚并气泡，揭示聚并沸腾气泡下的液-气结构。首先，我们在密闭空间（Hele-Shaw池）进行了普通沸腾实验。我们发现气泡和气泡下的液体部分合并在一起。根据实验结果，我们设计了一个MEMS传热表面，1)薄膜加热器用于瞬态加热，2)镍电极用于制造微小的氢泡作为沸腾核，3)薄膜热电偶。

This research aims to reveal the liquid-vapor structure beneath the coalescing boiling bubbles by realizing the minimum unit of boiling phenomena, a pair of coalescing bubbles. First, we have conducted the ordinary boiling experiment in a confined space (Hele-Shaw cell). We found the coalescence of the bubble and liquid portion under the bubble. In accordance with the experimental results, we design an MEMS heat transfer surface with 1) Thin film heaters for transient heating, 2) Nickel electrodes for making a tiny hydrogen bubble as boiling nuclei, and 3) thin film thermocouples.