Development of Nano-mechatronics for ultra-high density data storage devices

为了实现超过100gb / In ^2的面积记录密度，基于纳米机电一体化的新型头部定位致动机构的重要基础技术已经过3年的研究并成功完成。所得研究结果总结如下：(1)采用有限元方法，从静态特性和动态特性的角度出发，设计了一种基于mems的头部定位执行机构，该机构可以在nm精度的水平方向和垂直方向独立工作。所提出的机构的尺寸约为200μm×80μm，由PZT薄膜在两个方向上驱动。(2)开发了实现新型头部定位作动机构的重要基础技术。这些是全微加工工艺技术和改进的深刻蚀技术，以制造高纵横比结构。我们还开发了新型多层PZT复合薄膜，并证实其具有良好的压电性能。(3)提出了基于mems的带有微执行器的有源滑块。我们提出的有源滑块采用PZT薄膜作为微致动器，控制滑块飞行高度小于10 nm。该设计理念与传统的被动空气轴承技术有很大的不同，并开发了主动滑块的微加工工艺。验证了新型主动起搏控制技术实现的可行性。(4)通过实验研究了超薄液体润滑膜对滑块动力学的影响，探讨了实现小于10 nm磁头/磁盘接口（HDI）的可行性。研究了滑块-润滑剂相互作用导致的周期性润滑油不均匀再分布，并从纳米技术的角度研究了HDI的设计指导。(5)利用扫描微椭偏仪研究了新型端环三磷腈全氟聚醚薄膜在碳表面的扩散特性。结果表明，新型润滑油的迁移率低于传统的Zdol，并且端基影响单层膜的厚度，可以估计新型润滑油膜在碳表面的存在构象。少

In order to achieve more than 100 Gb/in^2 area recording density, the important fundamental technologies, which are evolutionary and necessary to develop novel head positioning actuator mechanisms based on nano-mechatronics have been studied for 3 years and completed successfully. The obtained research results are summarized as follows ;(1)Novel MEMS-based head positioning actuator mechanisms, which operate in not only lateral but also vertical directions independently at nm accuracy, were designed from the static and dynamic characteristics points of view, using FEM. The features are that the dimensions for the proposed mechanism is about 200μm×80μm and actuated by PZT thin films in two directions.(2)The important fundamental technologies are developed in order to achieve the novel head positioning actuator mechanisms. Those are total micro-machining process technologies and improved deep etching technologies to fabricate high aspect-ratio structures. We also develop the novel multi-l … More ayered composite PZT thin films, which is confirmed to have the very good piezoelectric properties.(3)MEMS-based active sliders with microactuators are proposed. The active sliders that we proposed use PZT thin films as a micro-actuator and control the slider flying height of less than 10 nm. This design concept is quite different from that for conventional passive air bearing technology, The micro-machining process for the active slider is also developed. We can confirm the feasibility of realizing the novel active pacing control technology.(4)The effects of ultra-thin liquid lubricant films on slider dynamics has been studied experimentally, in order to investigate the feasibility of realizing less than 10 nm head/disk interface (HDI). It was found that the periodic lubricant non-uniform redistribution caused by the slider-lubricant interactions was occurred and we studied the HDI design instructions from nano-technology point of view.(5)Spreading characteristics of novel cyclotriphosphazene-terminated pertluoropolyether films on carbon surfaces were investigated by using a scanning micro-ellipsometer. It was found that the mobility of novel lubricant is lower than that of conventional Zdol and the end groups affect the monolayer film thickness and the existing conformation of novel lubricant films on carbon surfaces cuold be estimated. Less