Development of Scanning Thermal Microscope with Microscale Quantitative Temperature Measurement Function.

扫描热显微镜（SThM）通过温度敏感悬臂梁探针提供拓扑和热图像。通常，SThM通过检测样品上的接触点的热信息并将其转换为校准曲线来被动地测量温度或热特性。然而，被动的方法不能采取定量的温度图像，因为测量值受到各种因素，如表面温度，热性能，样品表面的不均匀性，吸附层，等等。因此，我们已经开发了一种新的主动方法，定量的温度成像，而不管在接触点的热导率的变化。在主动式方法中，热反馈控制步骤通过检测沿着悬臂梁的热流并将与之成比例的功率馈送到悬臂梁上，使悬臂梁保持与样品表面相同的温度，然后由悬臂梁上的另一传感器测量悬臂梁的温度。电加热器、温度传感器和反馈电路。主动系统在真实的温度测量中表现出良好的性能，而不考虑热

Scanning Thermal Microscope (SThM) provides topological and thermal images by a temperature sensing cantilever probe. Usually, the SThM passively measures temperature or thermal properties by detecting thermal information through a contact point on a sample and converting it with a calibration curve. However, the passive method can't take quantitative temperature image because measured values are influenced by various factors such as surface temperature, thermal properties, unevenness of sample surface, adsorption layer, and so on. Therefore, we have developed a novel active method for quantitative temperature imaging regardless of variations in thermal conductance at the contact point. In the active method, a thermal feedback control step maintains the cantilever at the same temperature as the sample surface by detecting heat flow along the cantilever and feeding power proportional to it to the cantilever, then cantilever temperature is measured by another sensor on it. We experimentally examined the active method by producing multi-function cantilevers with a heat flow sensor, electric heater and a temperature sensor and a feedback circuit. The active system demonstrated good performance in real temperature measurement regardless of thermal