Dry 3He/4He-Dilution refrigerator with pulse tube cooler

科学上新知识的获得以及工业环境中技术可能性的扩大往往伴随着传感器和探测器系统的发展。特别是，很明显，传统的探测器和传感器系统不能满足科学、社会和工业的要求。出于这个原因，目前人们强烈关注开发基于量子技术的探测器和传感器。通过利用量子力学效应，这种探测器可以使探测器的性能大大提高，远远超过经典系统的限制。卡尔斯鲁厄理工学院微纳电子系统研究所的研究活动旨在开发这种量子技术探测器和传感器。特别是超高时间和能量分辨率的超导体多通道探测器和传感器系统的开发，以使其成为基础研究、应用研究和工业中的关键技术；为了使所开发的探测器能够运行和表征，需要一台3He/4He稀释式制冷机，能够根据不同的探测器和传感器技术要求在10MK到10K之间连续产生工作温度。系统的预冷必须不需要使用氦浴，或者必须基于脉冲管冷却器，以允许来自外部源的光子或大质量粒子耦合。此外，低温恒温器必须提供安装探测器和传感器运行所需的冷电子元件的可能性。

The gain of new knowledge in science as well as the expansion of technological possibilities in the industrial environment are very often accompanied by advances in the development of sensor and detector systems. In particular, it very often becomes apparent that conventional detector and sensor systems do not meet the requirements set by science, society and industry. For this reason, there is nowadays a strong focus on developing detectors and sensors based on quantum technology. By exploiting quantum mechanical effects, this kind of detectors allow increasing the detector performacne far beyond the limits of classical systems. The research activities at the Institute of Micro- and Nanoelectronic Systems (IMS) at Karlsruhe Institute of Technology (KIT) aim at the development of such quantum-technological detectors and sensors. Specifically, superconductor-based multi-channel detector and sensor systems with ultra-high time and energy resolution are developed in order to establish them as a key technology in basic research, applied research as well as industry.For the operation and characterization of the developed detectors, a 3He/4He dilution refrigerator is required that can continuously generate the operating temperatures between 10 mK and 10 K as required for the different detector and sensor technologies. Pre-cooling of the system must not require the use of a helium bath or must be based on a pulse tube cooler to allow the coupling of photons or massive particles from external sources. In addition, the cryostat must offer the possibility to install cold electronic components necessary for the operation of the detectors and sensors.