Fundamental Reserch on High Speed Fabrication of Perpendicular Magnetic Recording Media

鉴于对实时记录媒体的高速制造，对双层媒体的设计准则，对媒体的高速和连续的干扰方法，以及预先编写的媒体的特性和性能的尊重。Both the recording layer of the Co-Cr perpendicular Anisotropy film和the Soft magnetic back layer were designed experimentally so to show two recording and reproducing的高度敏感性，以及高密度响应。设计概念在理论上是明确的，分析了主极头部区域分布和间距在主极和后层之间的影响。一个由磁铁喷射器组成的新的永久性滚动涂层系统是由磁性介质组成的。1 m/min的deposition rate，<micro>6 m/hr. were accomplished by the system。5英寸的柔性磁盘的制造速度比传统批处理系统高出100次。Sputtering conditions such as impurity gases during sputtering and surface conditions of the organic base films were studed with respect to the medium quality。最后，高质量的媒体与大型的异构和光滑的表面即使在滚动涂层系统中也是真实的。制造双层磁盘介质显示30 dB重写和45 dB S/N比率在100 kBPI，其中头部介质间距has been reduced below 500 &lt;]A&gt; .最后，我们可以将初始研究目的描述为成功完成的，并且基本质量分析的基础。

With respect to high-speed fabrication of perpendicular recording media, the design criterion on the double layer media, the high speed and continuous sputtering method of the media, and the properties and performances of the prepared media were studied.1. Both the recording layer of the Co-Cr perpendicular anisotropy film and the soft magnetic back layer were designed experimentally so as to show high sensitibities of both recording and reproducing and high density response. The design concepts has been clarified theoretically by analyzing the main-pole head field distribution and spacing effect between the main-pole and the back layer.2. A new continuous roll coater system of the perpendicular media by magnetron sputtering was constructed. The deposition rate of 1 <micro> m/min. and the through-put of 6m/hr. were accomplished by the system. The fabrication speed of 5 inches flexible disk is 100 times as high as that of the conventional batch system.3. Sputtering conditions such as impurity gases during sputtering and surface conditions of the organic base films were studied with respect to the medium quality. Finally, high quality media with large anisotropy and smooth surface could be realized even for the roll coater system. The fabricated double layer disk media showed 30dB overwrite and 45dB S/N ratio at 100kBPI, where the head medium spacing has been reduced below 500 <゜]A> .Finally, we can conclude that the initial research purposes are successfully completed, and fandamentals of massproduction of the perpendicular medium are established.