STUDY ON TRAVELING MICROMECHANISM

本研究试制了应具有微机构最大特点的行走微机构，解决或解决了其加工过程中存在的问题。(1)设计基础：通过对自然和人工旅行物的行驶速度进行调查，找出了一些自然规律。研究了平面摩擦副与径向轴和轴承副之间的摩擦系数，发现尺寸在0.1 mm以下时摩擦系数突然增大。从零件的制造精度出发，分析了微机构的最小尺寸。(2)行走机构：利用水的表面张力在天花板和墙面上行走的机构是在观察昆虫后创造出来的。明确了软表面上微机械的特点。(3)执行器：以吸水聚合物凝胶为执行器，推导了电流变形的基本方程，并试制了人工温控和凝胶电机。(4)供能：研究了电磁波、太阳能电池、超声波等几种供能方法。作为周向能量的利用方法，制作了破裂压力驱动的管内气球模型并进行了试验，为布朗运动能的利用做了基础性的研究。(5)微小作用力的测量：利用双金属压电膜的振动阻抗变化进行了实验研究，获得了10-6[N]的灵敏度，并将该方法应用于ANT功率的测量。

In this study, traveling micromechanisms which should have the most kinds of special features of a micromechanism were trially made and the problems in the process were solved or cleared. (1)Basics of design: Investigating the traveling speeds of natural and artificial traveling things,some natural laws were found out. About the frictional coefficients between flat surfaces pair and radial shaft and bearing pair were investigated and sudden increase at the size below 0.1mm was cleared. The minimum size of the micro mechanisms were analized from the manufacturing accuracy of their parts. (2)Traveling mechanisms : The traveling mechanisms on the ceiling and wall using the surface tension of water were created after the observation of insect. The special feature of the micromechanism on the soft surfaces were cleared. (3)Actuator : For using the water absorptive polymer gel as the actuator, the fundamental equation of the deformation due to electric current was induced and the artificial warm and gel motor were trially made. (4)Supplying energy : Some methods using the electro-magnetic wave, the solar battery, the ultrasonic wave and etc. were investigated. As the method using the circumferantial energy, the balloon model for inside of tube driven by fractuating pressure was made and tested and fundamental study of utilizing the Brown motion energy was done. (5)Measurement of small amount force : Using the vibration impedance change of bimolph piezo-film was investigated and the sensitivity of 10-6[N] was obtained and the method are going to apply to the power measurement of ant now.