Scanning Capacitance microscope

本研究的目的是研制一种分辨率比扫描隧道显微镜和电子显微镜低，但比光学显微镜高的扫描电容显微镜。然后，它可以提供比前者处理的对象更粗的对象的图像，而后者处理的对象更精细。因此，它可以用作例如光学显微镜的放大功能。要实现这一点，有几种选择。根据以下研究结果，我们搭建了一台扫描电容显微镜：(1)扫描方法：有两种扫描方式。一种是舞台驱动法，另一种是触控笔驱动法。从串扰噪声和偏斜度的角度来看，后者优于前者。(2)静电电容检测方法：有两种检测方法。一种是直接法，另一种是差分电容法。从…的角度来看，后者优于前者附加振动频率：最初采用160HZ作为差动电容法的附加振动频率。但是，从S/N比的角度来看，频率越高越好，所以最终还是使用10 kHz。(4)信号检测方法：有两种检测方法。一种是包络检测法，另一种是同步检测法。从S/N比和稳定性的角度来看，后者优于前者。(5)Z轴驱动方式：有两种驱动方式。一种是直接将探测器输出作为表面观察输出图像，另一种是2.5维扫描法，在使用高反馈时，将触针高度作为表面图像输出，从而使探测器输出保持恒定。从线性和稳定性的角度来看，后者优于前者。利用本研究开发的显微镜拍摄了包括金属表面和半导体表面在内的多幅图像。较少

The objective of this research is to develop a scanning capacitance microscope which has although lower resolution power than STM and electron microscope, but has higher resolution power than optical microscope. Then, it can provide images of objects coarser than those the former deals with and finer the latter deals with. Thus, it can be used as a zoom up function of an optical microscope, for example. There are several choices to realize it. We built a scanning capacitance microscope according to the following investigated results:(1) Scanning method: There are two types of scanning. One is stage driving method and the other is stylus driving method. We concluded that the latter is superior to the former from the view point of cross-talk noise and skewness.(2) Electro-static capacitance detection method: There are two types of the detection methods. One is a direct method and the other is differential capacitance method. We concluded that the latter is superior to the former from the … More view point of S/N ratio.(3) Additive vibration frequency: Initially 160 Hz was used as the additive vibration frequency of the differential capacitance method. Finally, however, 10 kHz is used, since the higher frequency is better from the view point of S/N ratio.(4) Signal detection method: There are two types of detection method. One is envelope detection method and the other is synchronous detection method. We concluded that the latter is superior to the former from the view point of S/N ratio and stability.(5) Z-axis driving method: There are two types of driving method. One is direct method which makes the detector output as the surface observation output image directly, and the other is 2.5 dimensional scanning method which outputs the stylus hight as the surface image when using hight-feedback so that the detector output is kept constant. We concluded that the latter is superior to the former from the view point of linearity and stability.Several images including metal and semiconductor surfaces are taken by using the microscope developed in this research. Less