STUDY ON A TRIAL MANUFACTURE OF HIGHLY 3-DIMENSIONAL PROFILING SYSTEM BY USING FIBER-OPTIC INTERFEROMETER

本研究的目的是对试件的表面形貌进行极高精度的测量，进一步完善光纤测量技术，提高高精度多点光纤测温或利用光学外差效应对物体进行高对比度三维测量后的光纤测量技术。该表面粗糙度测量系统利用单模光纤耦合器组成干涉仪，利用机械扫描设备实现隔膜的三维移动，并通过数据信息处理机自动输出测量结果，垂直方向的分辨率为0.3 nm，水平方向的分辨率为1um，使测量系统具有足够的稳定性，可用于实际应用。此外，由于本研究追求的是适用的光纤接口…的实际应用更多的传感器测量，特别是利用简单的迈克尔逊干涉仪、光学相位传感和同步检测系统，使超高灵敏度的表面轮廓测量系统实用化，利用光纤，可以制作基于光纤回路装置的多点温度传感器，该光纤回路装置的谐振频率随着温度的变化而变化。这种光学温度传感器被认为是一种非常实用的东西，因为传感器部分的结构非常简单和耐用，并且可以根据谐振器的长度等参数选择放置位置。除此之外，正在考虑改进和开发利用光纤谐振器测量电压或声音的新型光纤传感器的计划。正如我们所说和所做的那样，本研究开发了一种新型的光纤传感器，它的简单用途之外，它可以被认为是证实其有效性的东西。较少

The purpose of this research is to measure the surface shape of a specimen with extremely high precision, and still more, to improve the fiber-optic measurement technology which is after still more, to improve the fiber-optic measurement technology which is after the higly precise multipoint fiber-optic temperature measurement or the highly contrastive 3-dimensional measurement of objects by using optical heterodyne effect.This surface roughness measuring system composes an interferometer by using the single mode optical fiber coupler, 3-dimensionally moves the sepcimen by employing mechanical scanning equipments, and automatically output's the result of the measurement by doing data information processing machines.It has the resolution of 0.3nm and 1mum for the vertical and horizontal direction respectively, which can make us get the measuring system having sufficient stability to be used practically. Besides, since this study pursues the practical use of applicable fiber-optic interf … More erence sensor measurements, it particularly aims to have the surface profiling measurement system with super high sensitivity practicallized by using simple Michelson interferometer, optical phase sensing and synchronized detection system.With the optical fiber, we can make multipoint temperature sensors which is on the basis of the optical fiber circuit device obtained by the fiber-optic loop resonators whose resonance frequency changes with the change of the temperature. This optical temperature sensor is considered as a highly practical thing since the structure of the sensor part is quite simple and endurable, and the place to be located is selectable according to the parameters such as the length of the resonator.Except these, plans for the improvement and development of new fiber-optic sensors to measure voltages or sounds by using optical fiber resonator are being taken into consideration.As we have said and done, this research has developed a new type of fiber-optic sensor beyond its simple purpose so that it could be considered as what confirmed its effectiveness. Less