FUNCTIONAL COATING BY MEANS OF RADIATE RF MAGNETRON SPUTTERING

刀尖涂层不仅要有良好的表面性能，而且要与基材有良好的结合力。前者与高稳定性、高强度等有关，后者与膜层与基材的结合特性等有关。WC-TiN梯度涂层是用多支S枪进行射频磁控溅射的。为了解释梯度涂层的机理，人们进行了各种分析：X射线衍射仪用于检查晶体结构，俄歇电子能谱分析用于检查化学成分，扫描电子显微镜用于观察分段膜层。两种机制在改善键合特性方面起着重要作用。一种是各层溅射沉积的元素具有与氯化钠类型相同的晶体结构。另一个原因是WC中的一部分碳扩散到了基材中。在高温下处于稳定状态时，由于快速冷却和部分碳的去除，沉积了β-WC_1-X和Gt；。

Coatings of cutting tips are demanded not only for their good surface properies but also for good adherence to the substrate. The former are related to high stability, high strength and etc. and the latter to bonding characteristics between film layr and substrate and etc. The WC-TiN gradient coating was conducted by rf magnetron sputtering using multi S-guns. In order to explain the gradient coating mechanism, various analyzes were carried out ; an X-ray Diffraction for an inspection of crystalline structures, an Auger Electron Spectral Analysis for an inspection of chemical compositions and a Scanning Electron Microscopy for observations for sectioned film layrs. Two mechanisms play an important role in improving the bonding characteristics. One is that sputter-deposited elements of each layr are composed of the same crystalline structure as NaCl type. Another one is a part of carbon from WC diffuses into the substrate. The deposition of a beta-WC_<1-X>, when in a stable state at high temperature, is due to a rapid cooling and removal of partial carbon.