BASIC RESEARCH OF DEVELOPING THIN FILM SENSOR

1. 降低温度变化对锰酸盐薄膜压力传感器输出的影响：将锰酸盐的组成从83Cu-14Mn-3Ni改变为87.4Cu-9.6Mn-3.0Ni (wt%)，可以降低温度对传感器输出的影响。压力传感器对温度变化的灵敏度由-76*10-6 (OMEGA/OMEGA) / C降至-(6-25)*10-6 (OMEGA/OMEGA) / C。因此，温度变化的压力测量误差从-3.45 MPa/ C减小到-(0.3-1.3)MPa/ C。减小应变对锰酸盐薄膜压力传感器输出的影响：为了减小应变的影响，设计了两种传感器模式。传感器模式由直线变为有间隙连接铅膜的phi1圆（形状类似OMEGA）和半径为0.4的两个半圆，导致计速大幅下降。这样就可以更精确地补偿由下面第3栏中解释的应变引起的误差。薄膜应变传感器组成的进一步发展：为了补偿薄膜压力传感器由于应变而产生的误差，研制出了只对应变敏感而对压力和温度不敏感的应变传感器。应变传感器材料为70.5Ni-18.5Cr-11.0Al.4。Au-Cr薄膜压力传感器的发展：发现Au-Cr薄膜压力传感器有可能只测量压力，而不受应变和温度的影响。该传感器的组成约为96.3Au-3.6Cr和97Au-3Cr。传感器厚度0.3 mm（由1994年购买的From Tracer测量）。主轴承上膜缺陷机理的澄清：在制造轴承上的传感器时，出现了透镜形状的膜缺陷。结果表明，在溅射过程中，当轴承温度高于150℃时，锡和铅就会出现透镜状缺陷。采用荧光型纤维温度计（1994）测量了溅射过程中的轴承温度。用1、2和5所述的传感器（带应变放大器，1994）成功地测量了柴油机和汽油机的主轴承油膜压力。活塞-腕销油膜压力的测量：利用在腕销滑动面上制作的薄膜传感器，成功测量了活塞销凸台与腕销之间的油膜压力。绝缘膜和保护膜由SiO2改为Al2O3，以提高膜的强度和传感器寿命（连续负载式表面测试仪，1995年测量）。在本次测量中，为了提高测量精度，传感器采用锰酸盐制成，而铅膜采用铝制成。少

1. Decreasing the effect of temperature change on the Manganin thin film pressure sensor output :The temperature effect on the sensor output could be decreaced by changing the composition of the Manganin from 83Cu-14Mn-3Ni to 87.4Cu-9.6Mn-3.0Ni (wt%). The sensitivity for temperature change of the pressure sensor was decreased from -76*10-6 (OMEGA/OMEGA) /ﾟC to -(6-25)*10-6 (OMEGA/OMEGA) /ﾟC.Therefore the pressure measurement error by the temperature change was decreased from -3.45 MPa/ﾟC to -(0.3-1.3) MPa/ﾟC.2. Decreasing the strain effect on the Manganin thin film pressrue sensor output :The two sensor patterns were developed to reduce the effect of strain. The sensor pattern were changed from straight line to phi1 circle which has a gap to connect lead film (which shape is like OMEGA) and to two half circle whose radius is 0.4, and it caused great decrease of gage rate. Then the error resulting from the strain explained in the following column 3 can be compensated more accurately.3. … More Development of the composition of thin film strain sensor :Strain sensor which has the sensitibity only for strain, but not for pressure and temperature was developed to compensate the error of the thin film pressure sensor resulting from strain. The strain sensor was made from 70.5Ni-18.5Cr-11.0Al.4. Development of the Au-Cr thin film pressure sensor :It was found that a Au-Cr thin film pressure sensor has a possibility to measure only pressure without the effect of strain and temperature. That sensor compositions are about 96.3Au-3.6Cr and 97Au-3Cr. The thickness of the sensor is 0.3mum (which was measured by From Tracer purchased in 1994).5. Clarification of the mechanism of a film defect on main bearing :In fabricating a sensor on a bearing, a film defect of lens shape appeared. It was made clear that the lens shape defect consist of Sn and Pb included in the bearing and it appeared when the bearing temperature became higher than 150ﾟC during spattering process. The bearing temperature during spattering process was measured by Fluorescence type fiber thermometer (1994).6. Main bearing oil film pressure of a diesel engine and gasoline engine were successfully measured by using the sensores described in 1,2 and 5 (with strain amplifier, 1994).7. Measurement of oil film pressure of piston-wrist pin :The oil film pressure between piston pin boss and wrist pin was successfully measured with thin film sensors which were made on the sliding surface on wrist pin. The insulation film and the protection film were changed from SiO2 to Al2O3 for improving the strength of film and the sensor life (which was measured by Continueous Load Type Surface Tester, 1995). In this measurement, sensor was made from Manganin, but lead film was made from Aluminum to improve the accuracy of measurement. Less