Development of thermal deformation speed controlled super precision grinding

1998年本报告为了将“热变形速度控制超精密磨削技术的开发”推向实用，进行了两个阶段的研究。(1)为了建立“热变形控速超精密磨削的研制”自适应控制系统，对磨床测量装置和D/A转换器的脉冲信号进行了分析。(2)为了建立工件热变形测量系统、激光位移测量尺亚微米测量装置和高速采样数据分析系统，本报告于1999年为将“热变形速度控制超精密磨削的研制”投入实际应用，进行了以下三个阶段的研究。(1)切入磨削时，工件与砂轮间的磨削热随磨削时间的延长而增加，工件的热变形是一个不可忽略的数值。利用侧板工件在线测量系统，开发了火花切入磨削和火花熄灭磨削工件热变形预测系统。(2)在本研究中，由于工件的尺寸是连续产生的，因此无法测量工件的热变形。通过工件的热变形预测工件的热变形，该系统可以高精度地预测出火花塞过程中工件真实的实时数据的热变形值。(3)提出了利用工件热变形预测系统测量工件在加工过程中火花熄灭后的尺寸误差，实现零尺寸误差磨削的方法。在本实验条件下，明确了零尺寸误差的高精度磨削应采用工件侧板在线测量工件热变形。

In 1998 for this report in order to put "Development of thermal deformation speed controlled super precision grinding" to practical use, following 2 stage research has been carried out.(1) In order to establish the adaptive control system of "Development of thermal deformation speed controlled super precision grinding", the measuring apparatus of grinding machine and pulse signal of D/A convertor.(2) In order to establish the measuring system of thermal deformation of workpiece, submicron measuring apparatus with laser displacement measured scale and data analysis system with high speed sampling unit.In 1999 for this report in order to put "Development of thermal deformation speed controlled super precision grinding" to practical use, following 3 stage research has been carried out.(1) In plunge grinding the grinding heat between the workpiece and wheel increases with the grinding time, and the thermal deformation of workpiece can not be negligible value. The predict system of the thermal deformation of workpiece in plunge grinding of spark-in and spark-out processes has been developed using the side plate workpiece in-process measurement system.(2) In this research the thermal deformation of workpiece can not be measured because the size of workpiece has been generated continuously. So that the thermal deformation of workpiece is predicted by the thermal deformation of workpiece this system can predict high precision value of the thermal deformation of workpiece real time data in spark-out process.(3) And in this report zero size error grinding method is presented with the predict system of thermal deformation of workpiece measuring the size error of workpiece after the spark-out in-process. In this experiment conditions the high precision grinding of zero size error is made clear that the thermal deformation of workpiece should be measured in-process with the side plate of workpiece.