Analysis for thin film delamination process and inverse analysis system considering a fine microstructure of interface and interfacial energy

在本研究中，我们试图通过构建薄膜分层模型并考虑界面处的微观结构来估计粘附力。从微观角度看，脱层过程与粘附过程相似。因此，我们编写了一个模拟薄膜粘附过程的程序，使用边界元法来模拟分层过程。在粘接过程中考虑了分子作用力。将JKR理论与实验结果进行了比较，验证了程序算法的有效性。然后，利用该程序对圆柱与半平面的附着进行了分析，并与基于JKR理论的结果进行了比较，验证了该程序的有效性。用原子的平衡长度除以位移控制方程和节点坐标。从而保证了计算的准确性和稳定性。在调查中推断出以下结果。将本文推导的黏附半径和最大黏附力与其他黏附理论进行比较，可以看出本文研究的有效性和实用性。分析了表面不均匀的圆柱体与表面平坦的圆柱体之间的附着问题。当将表面不均匀的圆柱体压向平面时，圆柱体粘附在平面上，保持原子平衡长度的距离。通过对最大粘附力、粘附区域半径和表面牵引力的比较，发现最大粘附力与表面凹凸不平数成正比3。提出了一种考虑表面应力和表面能的纳米黏附理论

In the present study, we pursued to estimate an adhesive force by constructing a model of thin film delamination and considering a microstructure at the interface. The delamination process is similar to the adhesion one from a microscopic view. Hence, we made a program for simulation of a thin film adhesion process using BEM to simulate the delamination process. Molecular force was taken into account in the adhesion process. JKR theory has been compared with the experimental results and demonstrated the validity of algorithm of program. Then, an adhesion between a cylinder and a half-plane was analyzed using the program, the validity of the program was examined by comparing with the results based on JKR theory. A governing equation of displacement and coordinates of node were divided by an equilibrium length of atoms. Consequently, an accuracy and stability of calculation could be kept. The following results were deduced in the investigation1. The validity and utilization of the present study could be shown through a comparison of adhesion radius and the maximum adhesive force deduced in our study with those in other adhesive theory2. An adhesion between a cylinder with an uneven surface and a flat surface was analyzed. When the cylinder with the uneven surface was pressed down to the flat surface, the cylinder adhered to the flat surface keeping the distance of equilibrium length of atoms. It was found that the maximum adhesion force is proportional to the number of uneven of surface through the comparison of the maximum adhesion force, the radius of adhesion region and the surface traction3. A new adhesion theory for nano size domain was presented considering surface stresses and surface energy