ACTIVE CONTROL OF OD-BLADE BY DYNAMIC PRESSURE OF GRINDING FLUID

在外径叶片切片加工中，加工过程中产生的叶片偏转对切割精度有很大影响。叶片偏转是由叶片磨损不对称、叶片侧面磨削性能不平衡等多种因素引起的。很难完全排除这些因素。因此，本文对叶片导向器主动控制叶片偏转的方法进行了研究。刀片导轨的槽是由刀片本身制作的，用于切片。首先，研究了固定导刀对切割精度的影响。在实验中，将陶瓷导向器安装在所有厚度为0.1 mm的电铸金刚石刀片上，并切割出厚度为2 mm的AlTiC。结果表明，叶片导向器可以抑制叶片的偏转。其次，对上述实验进行了模拟，从理论上论证了叶片导向器对切割精度的影响。结果表明，采用导向器后，刀具的切割偏差可减小到2/3左右。此外，还研制了一套利用电涡流位移传感器监测叶片挠度，并利用压电叠层改变导向器位置的系统，并对该系统的控制方法进行了研究。通过实验发现，传感器输出Z_S与切割轨迹Z_W与刀片导向位置Z_G之间存在着一定的关系F(Z_G，Z_S，Z_W)=0，因此，改变刀片导向位置Z_G，使方程F(Z_G，Z_S，0)=0即可抑制切割偏差。

In the slicing processing with outer diameter blade, the blade deflection caused while processing has a large effect on the cutting accuracy. The blade deflection is caused by various factors such as an asymmetric wear of blade, imbalance of grinding performance of blade side faces and so on. It is difficult to exclude those factors completely. Therefore, the method of actively controlling the blade deflection with a blade guide was examined in this research. The slot of the blade guide was made by the blade itself which is used for slicing. At first, the effect of the fixed blade guide on the cutting accuracy was examined. In the experiment, the blade guide made of ceramics was set to the electroformed diamond blade of all blade type of 0.1mm in thickness, and AlTiC of 2mm in thickness was cut. As a result of it, it was clarified that the blade deflection can be suppressed with the blade guide. It is thought that the effect is brought by the dynamic pressure of grindig fluid caused in the wedge gaps between the blade sides and the guide faces.Next, the above-mentioned experiment was modeled and the effect of the blade guide on the cutting accuracy was exmained theoretically. As a result of it, it was shown that the cutting deviation from the correct cutting path is suppressed to about 2/3 by using the blade guide.In addition, a system which can monitor the blade deflection with an eddy current displacement sensor and can change the position of the blade guide with an piezoceramic stack was made for trial purposes and, moreover, the control method for it was examined. From some experiments it was found that there is a certain relationship of F(Z_G, Z_S, Z_W)=0 among the sensor output Z_S and the deviation of cutting path Z_W and the blade guide position Z_G. Therefore, it is thought that the cutting deviation can be suppressed if the blade guide position Z_G is changed so that the equation F(Z_G, Z_S, 0)=0 is satisfied.