Preparation of High-Performance Photosensitive Gel Films and Their Fine-Patterning

烷基取代β-二酮和羟基取代芳香酮制备光敏ZrO_2凝胶膜：为了阐明化学修饰剂的结构与图案化性能之间的关系，采用β-二酮和羟基取代芳香酮对正丁醇锆进行化学修饰，制备了ZrO_2凝胶膜。实验结果表明，通过掩模紫外光照射和浸析可以形成精细图形，某些薄膜的光敏性比用乙酰丙酮化学修饰的凝胶薄膜高。光敏性Nb_2O_5凝胶薄膜的制备及其精细图形化：以苯甲酰丙酮化学修饰的乙醇铌为原料，采用溶胶-凝胶法制备了Nb_2O_5凝胶薄膜。在通过掩模UV照射后，凝胶膜的浸出给出掩模的精细负图案。通过热处理，非晶凝胶膜转化为多晶氧化铌膜， ...更多信息 超过600℃。SiO_2-ZrO_2光敏凝胶薄膜的制备及其精细图案化：以正硅酸乙酯和正丁醇锆为原料，采用溶胶-凝胶法制备了SiO_2-ZrO_2双组分凝胶薄膜。结果表明，该凝胶膜具有光敏性，通过掩模紫外光照射和浸析，可以形成精细的图形。光敏ZrO_2凝胶膜的选择性着色：利用光敏凝胶膜，开发了一种新的选择性着色工艺。未辐照部分的含染料SiO_2凝胶膜保留下来，而辐照部分的含染料SiO_2凝胶膜在漂洗时被除去。化学改性钛醇盐的光吸收和电子态：用DV-X α簇方法计算了不同取代基的β-二酮稳定的钛醇盐的电子态。讨论了光吸收的来源和醇盐在光照射下的分解反应机理。少

Preparation of Photosensitive ZrO2 Gel Films Using Alkyl-substituted β-Diketones and Hydroxyl-substituted Aromatic Ketones : In order to elucidate the relationship between the structures of chemical modification reagents and the patterning properties, ZrO2 gel films were prepared from zirconium butoxide chemically modified with β-diketones and hydroxyl-substituted aromatic ketones. It has been found that fine patterns can be formed by UV-irradiation through a mask and leaching, and some films have higher photosensitivvity than the gel film chemically modified with acetylacetone.Preparation of Photosensitive Nb2O5 Gel Films and Their Fine-Patterning : Nb2O5 gel films were prepared from niobium ethoxide chemically modified with benzoylacetone by the sol-gel method. Leaching of the gel films after UV-irradiation through a mask gave fine negative patterns of the mask. The amorphous gel films were converted to the polycrystalline niobium oxide films by the heat treatment at temperatures of … More more than 600℃. The polycrystalline films exhibited high refractive indices.Preparation of Photosensitive SiO2-ZrO2 Gel Films and Their Fine-Patterning : SiO2-ZrO2 two-component gel films were prepared from tetraethoxysilane and zirconium buthoxide chemically modified with benzoylacetone by the sol-gel method. It has been found that the gel films are photosensitive and fine patterns could be formed by UV-irradiation through a mask and leaching.Selective Coloration of Photosensitive ZrO2 Gel Films : A selective coloration process has been newly developed utilizing photosensitive gel films. The dye-containing SiO2 gel film on the unirradiated part of the ZrO2 gel film remained, while that on the irradiated part was removed upon rinsing.Optical Absorption and Electronic State of Chemically Modified Ti-Alkoxides : Electronic state of titanium alkoxides stabilized with β-diketones which had various substituents was calculated by the DV-X α cluster method. The origin of the optical absorption and the mechanism of the decomposition reaction of alkoxides with irradiation of light were discussed. Less