Improvement of Stainless Steel by the Titanium Oxide Thin Film Coating with the Sputtering Method

研究了钛氧化膜对不锈钢性能的改善作用.特别是，氧化钛的亲水性提高了不锈钢和水的传热系数。这一特性大大提高了不锈钢热机的热效率。采用射频磁控溅射法在不锈钢表面制备了TiO_2薄膜。该方法具有比溶胶-凝胶法和浸渍法更高的附着力，并对成膜条件与水滴接触角的关系进行了研究。结果表明，氧化钛的晶体结构影响接触角和亲水性的稳定性。纳米TiO_2比金红石型TiO_2具有更高的亲水性。用桥位氧的作用解释了这一现象。我们找到了最佳的形成条件，以获得高的亲水性和粘附力。

We investigated the improvement of the function of stainless steel with coating titanium oxide film. Especially, hydrophilicity of titanium oxide improves heat transmission coefficient of stainless steel and water. This property improves very much thermal efficiency of heat engine of stainless steel. TiO_2 films were coated with RF magnetron Sputtering method on stainless steel. This method has high advantage of adhering force than Sol-Gel method and Dipping method.The relation between the formation condition of film and the contact angle of water droplet was evaluated. It was found that the crystalline structure of titanium oxide affects the contact angle and stability of hydrophilicity. The anatase TiO_2 showed high hydrophilicity than rutile structure. This phenomenon was explained by the function of bridging site oxygen. We found the optimum formation condition to accomplish high photophilicity and adhering force.