Research on High-speed and Microfabrication of Electrolyte Jet Machining

电解液喷射加工是通过在喷嘴和工件之间施加电压同时将电解水溶液从喷嘴向工件喷射来进行的。由于电流分布在一个狭窄的区域，只有直接在射流下的材料被电解加工。通过扫描喷嘴，在不使用掩模的情况下，实现了对轴承表面微槽和复杂形状的应用。为了提高加工效率，实现微加工，实现复杂的三维生成，减少喷嘴磨损，本研究进行了实验和仿真。研究结果表明：1、研究结果表明：采用多喷嘴可提高加工效率。通过在喷嘴和注射器之间插入过滤器来去除电解液中的微小外来颗粒。实现了喷嘴内径为25微米的加工。建立了复杂三维曲面加工中喷嘴路径和扫描速度的计算方法。通过实验和仿真验证了上述叠加方法的有效性。采用区间优化的逐层叠加是减小叠加误差的有效方法。由于加工过程中喷嘴磨损是由局部细胞现象引起的，采用一种金属制成的喷嘴消除了喷嘴磨损。作为一种应用，进行了表面有凹痕的锯丝的制造。使用窄矩形喷嘴，即使在金属丝振动的情况下，也能有效地在金属丝表面产生凹痕。

Electrolyte jet machining is carried out by jetting the electrolytic aqueous solution from a nozzle toward the workpiece while applying voltage between the nozzle and workpiece. Only the material directly under the jet is machined by electrolysis because the current is distributed in a narrow area. By scanning the nozzle, applications to micro grooves on bearing surface and complicated shapes were achieved without using masks. In this research, experiments and simulations were carried out in order to improve the machining efficiency, in order to realize micro machining, to realize complicated 3 dimensional generation, and to decrease the nozzle wear. As the results, the following achievements were obtained.1. The machining efficiency was improved by using multiple nozzles.2. The micro foreign particles in the electrolyte were removed by inserting a filter between the nozzle and syringe. And machining with a nozzle of 25 micron inner diameter was realized.3. A method to calculate the path and scanning speed of the nozzle for machining complicated 3 dimensional surfaces was established.4. The efficiency of the above superimposing method was confirmed by experiments and simulations.5. Layer-by-layer superimposing with interval optimization is an effective way to reduce superimposing error.6. Since the nozzle wear during machining occurs due to local cell phenomenon, the nozzle wear was eliminated by using the nozzle made of one kind of metal.7. As an application, manufacturing of a saw wire with dimples on its surface was carried out. By using a narrow rectangle nozzle, dimples on the wire surface were efficiently produced even if the wire vibrated.