Investment of Antenna-excited microwave discharge lamps with intensity, long life time and high luminous efficacy

本文将微波放电（AEMD）推广到天线间隙为1.0-1.5mm的高压氙准分子灯。使用充有1.0-20个大气压的氙气的灯来测量灯的特性。灯的放电由连续或脉冲调制的微波功率维持，并且由累积真空紫外功率计测量了氙准分子的172 nm线强度。实验结果表明，当微波功率为8 W，氙气气压为10个大气压时，可获得172 nm的最大谱线强度。本文研究了脉冲调制微波灯点火以提高谱线强度。通过调整脉冲频率和占空比来优化氙准分子的产生，线强度已被提高到比市售氘灯高2倍。这些氙灯辐射的真空紫外光从一个小放电柱的高度为1.0- 1.5毫米，直径为1.0毫米。其次，从电路理论的角度考虑了微波功率向AEMD灯中心的传播。指出微波电路中各部分的比阻抗应与灯阻抗相同。此外，为了使功率因数达到1，灯阻抗的电抗应接近于零。最后，利用椭圆镜表面镀铝薄膜以获得良好的光反射，构建了一种小型便携式金属卤化物灯光引擎。为了降低光引擎的成本和紧凑的结构，微波电路中的匹配元件已被删除。因此，这里生产的原型光引擎具有50厘米厚，150厘米长，10厘米宽的矩形平行六面体结构，其中金属卤化物灯设置在镜子的焦点上。

Antenna-excited microwave discharge (hereafter abbreviated by AEMD) has been extended to high pressure xenon excimer lamps with antenna gap of 1.0-1.5mm. The lamps filled with xenon gas at the pressure of 1.0-20 atmospheres were used to measure the lamp properties. Discharge of the lamps was sustained by continuous or pulse-modulated microwave power and 172nm line intensity from xenon excimer has been measured by the accumulated VUV power meter. It is found that the maximum of 172nm line intensity could be obtained at the continuous microwave power of 8W and the xenon gas pressure of 10 atmosphere. The pulse-modulated microwave lamp ignition has been examined to increase the line intensity. By adjusting the pulse frequency and duty ratio to optimize the xenon excimer production, the line intensity has been improved to 2 times higher than that from commercially available deuterium lamps. These xenon lamps radiate the VUV light from a small discharge column with the height of 1.0-1.5mm and diameter of 1.0mm. Therefore, this xenon lamp can work as a spot VUV light sources.Next, the microwave power propagation into the center of the AEMD lamps has been taken into account from the view point of electric circuit theory. It is pointed that the specific impedance of all parts used in the microwave circuit should be the same values as the lamp impedance. Furthermore, the reactance of the lamp impedance should be close to zero for the operation of power factor～1.Finally, the compact portable light engine for the metal halide lamp has been constructed using elliptic mirror coated by aluminum thin film for good light reflection. For the cost reduction and compact structure of the light engine, the matching elements in the microwave circuit have been removed. As a results, the proto-type light engine produced here has a rectangular parallelepiped structure with 50cm thick, 150cm long and 10cm wide, where the metal halide lamp is set up on the focal point of the mirror.