Thermal nanoimprinting of ultraprecision glass-optical devices

对玻璃光学器件的热压印进行了实验测试和有限元数值模拟。利用压缩蠕变试验对玻璃材料的热粘弹性能进行了估算。在本研究中，D263被用作玻璃材料。利用聚焦离子束（FIB）加工的非晶碳模具对玻璃进行了热压印实验。研究了获得合适转录谱的最佳温度条件。此外，采用有限元法对玻璃的热压印过程进行了数值模拟。将实验结果与数值计算结果进行比较，实验得到的沟槽或微透镜高度的换算值与数值计算值基本一致。通过单轴拉伸试验，得到了抗拉强度与温度、应变速率的关系。

Some experimental testing and numerical simulations by FEM for thermal imprinting of glass-optical devices were investigated. Thermo-viscoelastic property of the glass material was estimated using compression creep tests. In this study, D263 was used as glass material. Glass thermal imprint tests were carried out with amorphous carbon dies that were given to line & space or micro-lens array pattern machined by focused ion beam (FIB). The optimum condition of imprinting temperature which given appropriate transcription profile of the glass was investigated. Moreover, numerical simulations for thermal imprinting of the glass were carried out by finite element method. Comparing experimental results with numerical ones, the transcription of height of groove or micro-lens obtained by experimental tests approximately agreed with numerical values. In addition, the relationship between tensile strength, temperature and strain rate was obtained by the uniaxial tensile test.