Control of nonlinear cantilever oscillation in dynamic-mode atomic force microscopy

动态模式原子力显微镜已经成为纳米科学和纳米技术领域研究和发展的基本工具。这种显微镜使我们能够利用悬臂梁传感器观察样品表面的形貌和物理特性，悬臂梁传感器对原子和分子水平的微小力非常敏感。另一方面，最近有报道称，由于悬臂梁传感器的不规则振荡，在测量过程中可能会发生显着的性能下降。在本研究计画中，我们提出了一种新的控制方法，以克服性能退化，并新开发出一个原型控制器的悬臂梁振荡。在实际的动态模式原子力显微镜中成功地证明了控制性能。

Dynamic-mode atomic force microscopy has been a fundamental tool for research and development in the fields of nanoscience and nanotechnology. This microscopy enables us to observe topography and physical properties of sample surfaces by utilizing cantilever sensors that are extremely sensitive for tiny force at the atomic and molecular level. On the other hand, it has been recently reported that significant performance degradation can occur during measurement due to the irregular oscillation of cantilever sensors. In this research project, we proposed a novel control method for overcoming the performance degradation and newly developed a prototype controller for cantilever oscillation. The control performance was successfully demonstrated in an actual dynamic-mode atomic force microscope.