Proposal of multifunct ional actuator operated by surface acoustic wave for micro total analysis system

近年来，微全分析系统（μTAS）因其在产生反应和减少试剂用量方面的高效性而受到广泛关注。在μTAS领域，表面声波（SAW）驱动器由于其结构简单，受到了广泛的研究。声表面波由一个叉指换能器（IDT）产生。因此，我们研究了叉指换能器的形状和液体流动之间的关系，以优化SAW致动器。研究发现，叉指换能器的最佳螺距与液体的粘度有关。然后，为了支持SAW驱动器的设计，我们研究了液体流动的物理机制，通过移动粒子半隐式方法的数值分析。研究表明，液体的流动是由声表面波的能量引起的，并受液体的粘性和液体与物质的波板之间的相互作用的影响。最后，根据B通过实验和分析所获得的知识，设计并制作了一种用于混合和反应两种溶液的微芯片。利用该芯片可以实现连续液流的局部快速混合。

Recently, micro total analysis systems(μTAS) have received a lot of attention for its efficiency in producing reactions and in reducing the used amount of reagents. In the area ofμTAS, s urface acoustic wave(SAW) actuators, because of their very simple structures, have studied. T he SAW is generated from an inter digital transduc er(IDT). We thus investigated t he relationship between IDT's shape s and liquid flows, in order to optimize the SAW actua tors. It was found that optimized IDT's pitch depends on viscosity of liquid. Then, in order to support de sign of the SAW actuators, we investigated the physical mechanism of the liquid flow by using numerical analysis of the moving parti cle semi-im plicit method. It was proven that the liquid flow is caused by t he energy of the SAW and is affected by the visco sity of the liquid and interaction between the liquid and a waved plate of a substance. Finally, on the knowledge obtained b y the experiment and the analysis, a micro chip for mixing and reacting 2 solutions was designed and fabricated. T he local and rapid mixing of conti nuous liquid flow was found to be pos sible by using the chip.