Development of multi-pixel microcalorimeters aiming for small scientific satellites

局部宇宙中超过一半的重子是未知的，它们很可能以低密度和约100万K的温热星系际介质(WHIM)的形式分布，红移线的高分辨率X射线光谱是唯一检测WHIM的方法，我们的目标是从一颗名为Dios的小卫星上进行研究。我们研制了400像素TES微量热计，采用多层布线技术，布线在被绝缘层隔开的硅衬底上进行。TES双层膜具有良好的超导转变特性。利用频域多路复用和基带反馈技术，发展了TES量能计阵列的读出方法。机械冷却器是作为ASTRO-H的工程模型开发的，它们可以用于DIOS。我们还对有效载荷进行了热设计和机械设计，确认了小卫星可以容纳所有的系统。还讨论了国际合作方案。

More than half of baryons in the local Universe are unidentified and they are likely to distribute as warm-hot intergalactic medium (WHIM) with low density and about 1 million K. High-resolution X-ray spectroscopy of redshifted lines is the only method to detect WHIM and we aim for a study from a small satellite called DIOS. We have developed 400 pixel TES microcalorimeters with a techinque of multilayer wiring method in which wirings run in layers of Si substrate separated by insulation layers. TES bilayers showed good superconducting transition properties. Readoud method of TES calorimeter arrays using frequency domain multiplexing and base-band feedback techniques have been developed. Mechanical coolers are developed as engineering models for ASTRO-H and they can be used for DIOS. We also performed thermal and mechanical design of the payload and confirmed that all the system can be accommodated in the small satellite. International collaboration scheme was was also discussed.