Development of a high sensitive and resolution angle sensor using single-cell photodiodes

本研究提出一种使用单细胞光电二极管测量小倾斜角度的角度传感器。这种传感器可以克服传统技术的一个弱点。缺点是受光电二极管单元间不敏感间隙的影响，信噪比降低。在自准直方法中，当减小光斑尺寸以提高角度传感器的灵敏度时，光斑强度分布的最强中心信号减小。最后对所研制传感器的性能进行了验证。

This research proposes an angle sensor using single-cell photodiodes to measure small tilt angles. This sensor can overcome a weakness in conventional technology. The weakness is decrease of S/N ratio because of the influence by the insensitive gap between the photodiode cells of multi-cell photodiode. In autocollimation method, when a light spot size is reduced to improve the sensitivity of angle sensor, the strongest central signal of the light spot intensity distribution decreases. The performance of the developed sensor is demonstrated.