Intra/extracellular nanoprobe arrays for electrical and chemical nanoscale measurements of neurons

我们开发了平面外，高纵横比，纳米级电极尖端微线阵列，用于穿透，多位点，纳米级生物传感器。采用各向同性硅蚀刻法在气液固生长硅微线的尖端形成纳米级尖端线。在电线表面涂上一层金属后，只有纳米尖端部分可以从周围的外壳中暴露出来。例如，二氧化硅和聚对二甲苯)的三维集成过程。作为一种器件应用，我们展示了聚苯乙烯纳米粒子在溶液中的捕获，使用了一种制备的金纳米尖端线阵列。此外，这些捕获的纳米颗粒可以注射到柔软的材料（明胶）中，展示了纳米颗粒的多位点广域批量深度注射。此外，我们还演示了用含有黄色荧光蛋白（YFP）基因的质粒将DNA多点/批量和局部转移到人胚胎肾细胞（HEK293）中。通过使用纳米尖端微线阵列，也可以对大脑切片和皮层等厚样本进行深度电纳米级测量，这有望成为未来神经科学的强大设备。

We developed out-of-plane, high aspect ratio, nanoscale electrode tipped microwire arrays for applications to penetrating, multisite, nanoscale biological sensors. A nanoscale tipped wire is formed with isotropic silicon etching to the tip of a vapor-liquid-solid grown silicon microwire. After coating the wire with a metal, only the nanotip section can be exposed from the surrounding outer shell(e. g., silicon dioxide and parylene) by three-dimensional integration processes. As a device application, we demonstrate the trapping of polystyrene nanoparticles in a solution using a fabricated gold-nanotip wire array. Moreover, these trapped nanoparticles can be injected into a soft material(gelatin), demonstrating a multi-site wide-area batch depth injection of nanoparticles. Also, we demonstrated multipoint/batch and localized DNA transfers into individual human embryonic kidney cells(HEK293) with plasmid containing yellow fluorescent protein(YFP) gene. Deep area electrical nanoscale measurements for thick samples such as brain slices as well as cortices would also be possible by using the nanotip microwire arrays, promising a powerful device for the future of neuroscience.