Development of reference-less wavelength scanning interferometerfor micro aspherical lens

在本研究中，我们发展了两种不同的干涉仪，其特点是不需要参考面。一种是极坐标剪切干涉仪，它实现了旋转和径向的波前剪切;另一种是零法干涉仪，它以空间光调制器为参考镜，通过零法扩展了动态范围。此外，还提出了相位检测算法的评价方法.对相位检测算法的改进有一定的帮助。

In this research, we developed two types of interferometercharacterized in that reference surface is not necessary. One is polar coordinate shearinginterferometer, which realizes wave front shearing for rotational and radial direction.Another is zero-method interferometer using spatial light modulator as a reference mirror.In the interferometer, the dynamic range was expanded by zero-methodology. Moreover, theevaluation method of phase detection algorithms were also developed. It is of assistance ofimprovement of phase detection algorithms.