SPP 1159: New Strategies for Measurement and Test Techniques for Production of Microsystems and Nanostructures

重点优先方案的目的是开发和提供基于深厚知识的新的科学战略和方法，用于定义参数，以描述面向功能的部件和表面需求，有目的地选择技术上和经济上合适的测量程序和测量过程，考虑影响或表示测量结果，以便在工业制造中应用。包括适用于车间使用的校准程序和标准。因此，微系统和纳米结构零件生产中的现有测量原理可用于在标准化测量和测试程序中实现面向功能、有意义和可追溯的结果。在该方案的子项目中，正在研究确定测量值的基本原则和规则、测试链的测量程序和元素设计，并在实际测试中对结果进行验证。

Aim of the Priority Programme of emphasis is developing and making available new scientific strategies and methods based on profound knowledge for definition of parameters to describe the function oriented demands on components and surfaces, for the purposeful selection of technically and economically appropriate measuring procedures and measurement processes, the consideration of affecting influences or the representation of results of measurement for application in industrial manufacturing. Included are calibration procedures and standards appropriate to shop floor use. Thus available measuring principles in production of microsystems and nano-structured work pieces can be used to achieve function oriented, meaningful and traceable results in standardised measurement and test procedures. In the sub-projects of the programme basic principles and rules for definition of measured values, measuring procedures and design of elements of the testing chain are under research and the results are verified in practical tests.