Enhanced position feedback and actuation control for stages with three motion axis in Z/tip/tilt

Prior Science正在寻找一种创新的解决方案，以开发Z/TIP/TILT和TIP/TILT纳米定位阶段的昆斯盖特控制和有效的校准策略。拟议的项目将需要进一步开发NPL纳米定位试验台，使用干涉仪和自准直仪的组合来测量角运动占主导地位的角位移。该设备将绘制Z/TIP/TIP和TIP/TILT阶段的性能图，以便为昆斯盖特Z/TIP/TILT阶段开发控制策略和适当的校准装置。预计这将使我们能够进一步开发具有潜力的半导体和光子学解决方案，具有五轴和六轴多轴解决方案的潜力。

Prior Scientific are looking for an innovative solution to develop Queensgate control for Z/tip/tilt and tip/tilt nanopositioning stages and effective strategies for calibration.The project proposed will require further development of the NPL nanopositioning test rig using a combination of interferometers and autocollimators to measure angular displacement where angular movements are dominant. This equipment will map the performance of the Z/tip/tilt and tip/tilt stages such that control strategies and appropriate calibration rigs can be developed for Queensgate Z/tip/tilt stages.It is anticipated that this will allow us to further develop semiconductor and photonics solutions with potential for multi-axis solutions with five and six axes.