High temperature corrosion protection of graphite parts for semiconductor industry

“下一代电子器件，特别是功率器件，是在各种材料的晶片上制造的。半导体工业开始在非常高的温度（高达1800 C）下处理晶片。支撑晶片的材料（即涂覆碳化硅的石墨）已经达到其1500 ℃的温度极限。为了满足半导体工艺中的高温和其他要求，需要引入新材料。Thermic Edge Coatings旨在开发新技术，在石墨上沉积耐高温材料，以保护其免受半导体工业应用中的腐蚀。"

"Next generation electronic devices, and especially power devices, are made on wafers a variety of materials. The semiconductor industry starts to process wafers at very high temperature (up to 1800 C). Materials to support the wafers (i.e. silicon carbide coated graphite) have reached their temperature limits at 1500 C. New materials need to be introduced which can fulfill the high temperature and other requirements used in those semiconductor processes.Thermic Edge Coatings aims to develop new technology for deposition of high temperature resistant materials on graphite in order to protect it against corrosion in semiconductor industry applications."