FEASIBILITY OF MULTIELECTRODE FABRICATION AND ASSEMBLY

一种用于中枢神经系统单单位记录的多电极阵列 密歇根大学一直在开发这一系统。 该装置的初步结果表明，它可以提供显著的 神经生理学研究进展 通讯过程及其在神经假体中的未来应用。 在广泛的基础上向神经生理学家提供这种设备将是 如果要实现该设备的全部潜力，就有必要这样做。 该阵列制造使用了微电子学和 采用定制工艺的硅微机械加工。第一阶段目标 正在开发一种与工业半导体兼容的工艺时间表 加工车间并确定装配程序和设备测试 需要生产一个用户就能使用的设备。最终目标是使 确定可行性后可商业化的多电极阵列 具有成本效益的生产。此外，拟议的研究将 为各种生物传感器的其他研发工作做出贡献 集成了片上电路和传感元件。第二阶段目标 实施阶段确定的制造和组装计划 我对它的产量、可靠性、质量和经济性进行了研究和评价。

A Multielectrode array for single-unit recording in the central nervous system has been under development at The University of Michigan. Preliminary results of the device indicate it could provide a remarkable advance for neurophysiological investigations in such areas as communicative processes and future applications in neural prostheses. Providing this device to neurophysiologists on a wide-spread basis would be necessary if the full potential of the device were to be realized. The array fabrication uses a novel combination of microelectronics and silicon micromachining utilizing a custom process. The Phase I objectives are to develop a process schedule compatible with industrial semiconductor process houses and identify the assembly procedures and device testing needed to produce a user-ready device. The ultimate goal is to make the multielectrode array commercially available after determining feasibility of cost-effective production. Additionally, the proposed research will contribute to other R&D efforts for a variety of biological sensors incorporating on-chip circuitry and sensing elements. Phase II objective are to implement fabrication and assembly schedules determined in the Phase I research and evaluate its yield, reliability, quality and economics.