Development of molecular vapor deposition methods for high integrated battery/device systems

该项目将开发与等离子沉积涂层和新的共形薄膜工艺相关的新技术，用于功能工业应用，并将专门开发与设备集成的电池解决方案。锂离子和钠离子电池技术使用通过分子气相沉积(MVD)沉积的电极涂层，将用作可穿戴设备、忆阻器、传感器和电力设备等设备的电源。分子气相沉积(MVD)是一种涂层技术，它可以在各种衬底上沉积非常薄(几纳米)的共形薄膜，包括与电化学应用相关的金属箔、复合颗粒电极和氧化物表面。MVD涂层还可以用于器件的高级封装和钝化。研究的目的是利用MVD的能力和灵活性来生长符合复杂衬底的功能薄膜，用于下一代充电电池、传感器、忆阻器和其他MEMS和功率器件-以展示集成电源/器件的应用。电介质、金属、有机物和有机-无机杂化聚合物的涂层都将被设计并整合到集成系统中。挑战是将电源与设备互连和隔离，以提供符合人体工程学的、重量轻和成本效益高的系统。集成系统可用于从健康诊断到智能手机的所有领域。结果是多方面的，包括(I)建立对各种衬底上定制表面涂层的影响的基本了解，(Ii)表征MVD功能涂层的物理和电性能及其沉积方法(Iii)扩大MVD技术在电池、医疗设备、传感器、忆阻器和电源设备涂层中的应用，以及(Iv)开发集成演示系统。

This project will develop new technologies related to plasma deposition coatings and new conformal thin film processes for functional industrial applications and will specifically develop integrated battery solutions with devices. Lithium-ion and Na-ion battery technology, using electrode coatings deposited via Molecular Vapor Deposition (MVD), will be used as the power source for devices including wearables, MEMRistors, Sensors and Power Devices. Molecular vapor deposition (MVD) is a coating technique which can deposit very thin (few nm) and conformal films on a variety of substrates including those relevant in electrochemical applications such as metallic foils, composite particulate electrodes and oxide-based surfaces. MVD coatings can also be used in advanced packaging and passivation of devices.The aim of the research is to exploit the capability and flexibility of MVD to grow functional thin films that conform to complex substrates for application in next generation rechargeable batteries, sensors, MEMRistors and other MEMS and Power devices - to demonstrate an integrated power source / device application. Coatings of dielectrics, metals, organics and hybrid organic-inorganic polymers will all be designed and incorporated into the integrated systems. The challenges are to interconnect and isolated the power sources with the devices to provide an ergonomic, lightweight and cost-effective system. Integrated systems could be used in everything from health diagnostics to smartphones.The outcomes are multiple and include (i) building a fundamental understanding of the effect of tailored surface coatings on a variety of substrates, (ii) characterising the physical and electrical properties of MVD functional coatings and their deposition methodology (iii) to widen the applications of MVD techniques in coatings for batteries, medical devices, sensors, MEMRistors and power devices and (iv) to develop an integrated demonstrator system.