Fabrication of high integrated microlens arrays on a glass substrate for 3D micro-optical systems
Fabrication of high integrated microlens arrays on a glass substrate for 3D micro-optical systems
复制标题
用于 3D 微光学系统的玻璃基板上高集成微透镜阵列的制造
DOI：
10.1016/j.apsusc.2018.06.267
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发表时间：
2018-11
影响因子：
6.7
通讯作者：
Xun Hou
中科院分区：
文献类型：
--
作者：
Yang Wei;Qing Yang;Hao Bian;Feng Chen;Minjing Li;Yanzhu Dai;Xun Hou
微透镜阵列已发展成为集成微光学系统中的基本元件。然而，在硬质材料上快速制造高集成度、高填充因子和多层微透镜阵列仍然是一个挑战。这里，提出了易于设计的高集成度双面凹面微透镜阵列。这些凹面微透镜阵列在双面玻璃基板上拥有近 5000 个紧密排列的微透镜，这些微透镜是通过飞秒激光湿法蚀刻工艺创建的。研究了集成微透镜阵列的光学特性，其表现出新颖的多样化成像模式，如同轴嵌套矩形、同轴嵌套六边形、非同轴嵌套六边形成像模式等。此外，通过控制微透镜的形状、尺寸以及双面玻璃芯片上微透镜阵列的排列，可以简单地实现多种成像图案。
Microlens array have been developed as an essential element in integrated micro-optical systems. However, rapidly fabrication of high integration, high fill factor and multi-layer microlens arrays on a hard material is still a challenge. Here, facilely designed high integrated double-sided concave microlens arrays were proposed. These concave microlens arrays possess nearly 5000 close-packed microlenses on a double sides glass substrate, which were created by femtosecond laser wet etch process. The optical properties of integrated microlens arrays were investigated, which exhibit novel diverse imaging patterns, such as coaxial nested rectangular-shaped, coaxial nested hexagonal-shaped, non-coaxial nested hexagonal-shaped imaging patterns,etc. Moreover, diverse imaging patterns can be simply realized by controlling the shape, the size of the microlenses and the arrangement of the microlens arrays on the double-sided glass chips.
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影响因子：
4.6
作者：
Choi W;Shin R;Lim J;Kang S
通讯作者：
Kang S
影响因子：
9.5
作者：
Gong, Jianliang;Xu, Bingang;Tao, Xiaoming
通讯作者：
Tao, Xiaoming
影响因子：
16.6
作者：
通讯作者：
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基于液态模具按需滴印的微球透镜结构制造
影响因子：
6.7
作者：
Li Zhu;Hejuan Chen;Lijun Yang;Weiyi Zhang
通讯作者：
Weiyi Zhang
影响因子：
3.6
作者：
Bhatia, V;Vengsarkar, AM
通讯作者：
Vengsarkar, AM