Fabrication of nested elliptical KB mirrors using profile coating for synchrotron radiation X-ray focusing
Fabrication of nested elliptical KB mirrors using profile coating for synchrotron radiation X-ray focusing
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使用轮廓涂层制造嵌套椭圆 KB 镜用于同步辐射 X 射线聚焦
DOI：
10.1016/j.apsusc.2011.02.079
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发表时间：
2012
影响因子：
6.7
通讯作者：
J. Tischler
中科院分区：
文献类型：
--
作者：
Chian Liu;G. Ice;Wenjun Liu;L. Assoufid;J. Qian;B. Shi;R. Khachatryan;M. Wieczorek;P. Zschack;J. Tischler
本文介绍了用于证明套式或蒙特尔光学用于同步加速器X射线束微/纳聚焦的优点的制造方法。标准的Kirkpatrick-Baez(KB)镜系统使用两个独立的椭圆镜，与X射线束成掠角，并以90°的顺序排列，在垂直和水平方向上依次聚焦X射线。嵌套的KB镜像系统使两个镜像彼此垂直且并排定位。与标准的KB反射镜系统相比，Montel光学系统可以聚焦更大的发散，而反射镜可以具有更短的焦距。因此，与标准的KB布置相比，可以制造出具有更高的退磁系数和最终更小的焦斑的嵌套镜。随着工作距离的增加，嵌套系统也更加紧凑，更加稳定，降低了镜像级的复杂性。然而，尽管Montel光学器件可用于实验室X射线源，但由于技术困难，它们尚未用于同步辐射X射线的微聚焦，在同步辐射X射线中，超精密镜面是必不可少的。将嵌套光学系统应用于同步加速器微聚焦的主要挑战是在两个反射镜相交的边缘和X射线散射的边缘制造出具有精确椭圆形表面轮廓的反射镜。例如，在我们的应用中，要实现高效率的亚微米聚焦，在直径为0.1 mm的∼横截面上，沿着X射线足迹的可用区域中，需要大约1 nm的表面图形均方根(RMS)误差。在这篇文章中，我们描述了使用我们的轮廓镀膜技术和廉价的平板硅衬底来制造精密嵌套KB镜的有前途的方法。
This paper describes fabrication methods used to demonstrate the advantages of nested or Montel optics for micro/nanofocusing of synchrotron X-ray beams. A standard Kirkpatrick-Baez (KB) mirror system uses two separated elliptical mirrors at glancing angles to the X-ray beam and sequentially arranged at 90° to each other to focus X-rays successively in the vertical and horizontal directions. A nested KB mirror system has the two mirrors positioned perpendicular and side-by-side to each other. Compared to a standard KB mirror system, Montel optics can focus a larger divergence and the mirrors can have a shorter focal length. As a result, nested mirrors can be fabricated with improved demagnification factor and ultimately smaller focal spot, than with a standard KB arrangement. The nested system is also more compact with an increased working distance, and is more stable, with reduced complexity of mirror stages. However, although Montel optics is commercially available for laboratory X-ray sources, due to technical difficulties they have not been used to microfocus synchrotron radiation X-rays, where ultra-precise mirror surfaces are essential. The main challenge in adapting nested optics for synchrotron microfocusing is to fabricate mirrors with a precise elliptical surface profile at the very edge where the two mirrors meet and where X-rays scatter. For example, in our application to achieve a sub-micron focus with high efficiency, a surface figure root-mean-square (rms) error on the order of 1nm is required in the useable area along the X-ray footprint with a ∼0.1mm-diameter cross section. In this paper we describe promising ways to fabricate precise nested KB mirrors using our profile coating technique and inexpensive flat Si substrates.
影响因子：
19.6
作者：
Mimura, Hidekazu;Handa, Soichiro;Yamauchi, Kazuto
通讯作者：
Yamauchi, Kazuto
使用 K-B 镜布置在 100 nm 级聚焦的衍射极限二维硬 X 射线
DOI：
--
发表时间：
2005
期刊：
Review of Scientific Instruments 76
影响因子：
--
作者：
安倍広多;柴山 守;Mikoshiba K.;S.Matsuyama
通讯作者：
S.Matsuyama