Additive manufacturing of three-dimensional (3D) microfluidic-based microelectromechanical systems (MEMS) for acoustofluidic applications.
Additive manufacturing of three-dimensional (3D) microfluidic-based microelectromechanical systems (MEMS) for acoustofluidic applications.
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DOI：
10.1039/c8lc00427g
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发表时间：
2018-07-10
期刊：
影响因子：
6.1
通讯作者：
Johnson BN
中科院分区：
文献类型：
--
作者：
Cesewski E;Haring AP;Tong Y;Singh M;Thakur R;Laheri S;Read KA;Powell MD;Oestreich KJ;Johnson BN
三维（3D）打印现在能够制造新型3D结构电子和微流体。然而，用于MEMS制造的常规减材制造工艺相对地将器件结构限制为二维，并且需要用于与微流体接口的后处理步骤。因此，这项工作的目标是创建一种用于制造基于3D微流体的MEMS器件的增材制造方法，该方法能够在一锅制造过程中实现机电系统的3D配置和微流体的同时集成。在这里，我们展示了使用增材制造制造基于微流体的3D微机电系统（MEMS）的能力，该系统包含正交的平面外压电传感器和致动器。这些设备是使用微挤出3D打印系统制造的，该系统包含集成的拾取和放置功能。增材组装的材料和组件包括3D打印的环氧树脂、聚二甲基硅氧烷（PDMS）、银纳米颗粒和共晶镓铟以及机器人嵌入的正交面外压电芯片（锆钛酸铅（PZT））。电阻抗谱和有限元建模研究表明，嵌入式PZT芯片表现出多种不同的模式形状在0 - 20 MHz的频率范围内的谐振模式。使用中性浮力颗粒（直径= 0.8 - 70 μm）的流动可视化研究证实，3D打印的MEMS器件产生的体声波（BAW）能够对液滴和微通道中的悬浮颗粒进行尺寸选择性操纵、捕获和分离。连续流格式的流动可视化研究表明，悬浮颗粒可以基于面内或面外PZT芯片的选择性致动朝向或远离微流体通道的壁移动。这项工作表明，增材制造可能为声流体和微流体设备的设计和制造提供新的机会。增材制造使得能够制造具有在3D声换能器配置之间交织的微流体通道的3D声流体。
Three-dimensional (3D) printing now enables the fabrication of novel 3D structural electronics and microfluidics. However, conventional subtractive manufacturing processes for MEMS fabrication relatively limit device structure to two dimensions and require post-processing steps for interface with microfluidics. Thus, the objective of this work is to create an additive manufacturing approach for fabrication of 3D microfluidic-based MEMS devices that enables 3D configurations of electromechanical systems and simultaneous integration of microfluidics in a one-pot manufacturing process. Here, we demonstrate the ability to fabricate microfluidic-based 3D microelectromechanical systems (MEMS) that contain orthogonal out-of-plane piezoelectric sensors and actuators using additive manufacturing. The devices were fabricated using a microextrusion 3D printing system that contained integrated pick-and-place functionality. Additively assembled materials and components included 3D printed epoxy, polydimethylsiloxane (PDMS), silver nanoparticles, and eutectic Gallium-Indium as well as robotically embedded orthogonal out-of-plane piezoelectric chips (lead zirconate titanate (PZT)). Electrical impedance spectroscopy and finite element modeling studies showed the embedded PZT chips exhibited multiple resonant modes of varying mode shape over the 0 – 20 MHz frequency range. Flow visualization studies using neutrally buoyant particles (diameter = 0.8 – 70 μm) confirmed the 3D printed MEMS devices generate bulk acoustic waves (BAWs) capable of size-selective manipulation, trapping, and separation of suspended particles in droplets and microchannels. Flow visualization studies in continuous flow format showed suspended particles could be moved toward or away from the walls of microfluidic channels based on selective actuation of in-plane or out-of-plane PZT chips. This work suggests additive manufacturing potentially provides new opportunities for the design and fabrication of acoustofluidic and microfluidic devices. Additive manufacturing enables the fabrication of 3D acoustofluidics with microfluidic channels interwoven among 3D acoustic transducer configurations.
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影响因子：
44.1
作者：
Friend, James;Yeo, Leslie Y.
通讯作者：
Yeo, Leslie Y.
影响因子：
6.1
作者：
Leibacher, Ivo;Schatzer, Sebastian;Dual, Jurg
通讯作者：
Dual, Jurg
影响因子：
10.8
作者：
Kong, Yong Lin;Tamargo, Ian A.;McAlpine, Michael C.
通讯作者：
McAlpine, Michael C.
影响因子：
7.4
作者：
Gross, Bethany C.;Erkal, Jayda L.;Spence, Dana M.
通讯作者：
Spence, Dana M.
DOI：
10.1007/s00170-014-5717-7
发表时间：
2014-05-01
影响因子：
3.4
作者：
Espalin, David;Muse, Danny W.;Wicker, Ryan B.
通讯作者：
Wicker, Ryan B.