Control of oxygen for magnetron sputtered ZnO:Al window layer in Cu(In,Ga)Se2 thin film solar cells

Control of oxygen for magnetron sputtered ZnO:Al window layer in Cu(In,Ga)Se2 thin film solar cells
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Cu(In,Ga)Se2 薄膜太阳能电池中磁控溅射 ZnO:Al 窗口层的氧控制

DOI:
10.1002/pssa.201700132
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发表时间:
2017-06
期刊:
physica status solidi (a)
影响因子:
--
通讯作者:
Mai Yaohua
Mai Yaohua
中科院分区:
其他
文献类型:
--
作者:
Niu Xiaona;Zhu Hongbing;Zhang Wen;Liang Xiaoyang;Guo Yuting;Li Zhiqiang;Chen Jinwei;Xu Ying;Mai Yaohua

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采用磁控溅射法在室温下制备了掺铝氧化锌(ZnO:Al)薄膜,并将其应用于Cu(In,Ga)Se2(CIGS)薄膜太阳电池中作为窗口层。不同的氧氩混合气体
In this study, aluminum doped zinc oxide (ZnO:Al) thin films were prepared by magnetron sputtering from a ceramic target at room temperature for application in Cu(In,Ga)Se2 (CIGS) thin film solar cells as a window layer. Different oxygen‐argon mixture gas
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