Tribological behaviors of oxygen-doped carbon coatings deposited by ion-irradiation-assisted growth
Tribological behaviors of oxygen-doped carbon coatings deposited by ion-irradiation-assisted growth
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离子辐照辅助生长沉积的掺氧碳涂层的摩擦学行为
DOI：
10.1016/j.surfcoat.2021.127689
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发表时间：
2021-11
影响因子：
5.4
通讯作者：
Li Yan
中科院分区：
文献类型：
--
作者：
Guo Meiling;Yang Lei;Yang Zhenchao;Zhang Dongya;Wang Qu;ai;Li Pengyang;Zhao Pengkang;Yang Mingshun;Li Yan
采用电子回旋共振等离子体处理系统，采用离子辐照辅助生长技术制备了掺氧碳涂层，研究了氧含量对涂层结构和摩擦学性能的影响。在涂层沉积过程中，氧等离子体中的O+，O2+，Ar+离子被吸引到照射生长的涂层表面，实现氧等离子体在蚀刻过程中。X射线光电子能谱（XPS）表征表明，O2的加入使碳涂层中引入了部分氧原子，整个涂层的sp3/sp2比值增加。这种结构变化使得碳涂层具有更高的耐纳米划痕性和更长的磨损寿命，从990次循环增加到5000次以上。最后，氧掺杂可以导致sp3/sp2比值增加的原因被认为是离子辐照诱导的化学复合能量释放，这只能发生在O2的引入降低原子位移阈值能量时。
Oxygen-doped carbon coatings were deposited by ion-irradiation-assisted growth using an electron cyclotron resonance plasma processing system, and the effects of the O2content on the coating's structure and tribological behavior were studied. During the coating deposition, O+, O2+, and Ar+ions in the oxygen plasma were attracted to irradiate the growing coating surface, realizing oxygen plasma during-etching. X-ray photoelectron spectroscopy characterization showed that the O2addition incorporated some oxygen atoms into the carbon coating, and thesp3/sp2ratio of the entire coating increased. Such structural changes made the carbon coating present higher nanoscratch resistance and longer wear life that increased from 990 cycles to more than 5000 cycles. Finally, the reason why the oxygen doping can induce thesp3/sp2ratio to increase was suggested to be ion-irradiation-induced chemical recombination energy release, which could only occur when the O2introduction reduced the atom displacement threshold energy.
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影响因子：
6.7
作者：
Kondratowicz, Izabela;Nadolska, Malgorzata;Zelechowska, Kamila
通讯作者：
Zelechowska, Kamila
影响因子：
10.9
作者：
F. Wang;Liping Wang;Q. Xue
通讯作者：
F. Wang;Liping Wang;Q. Xue
影响因子：
--
作者：
W. Fite;R. Brackmann
通讯作者：
W. Fite;R. Brackmann
影响因子：
6.7
作者：
Liudi Jiang;A. Fitzgerald;M. Rose;R. Cheung;B. Rong;E. V. Drift
通讯作者：
Liudi Jiang;A. Fitzgerald;M. Rose;R. Cheung;B. Rong;E. V. Drift
影响因子：
3.7
作者：
Ferrari, AC;Robertson, J
通讯作者：
Robertson, J