Dynamic-Ron in Small and Large C-doped AlGaN/GaN-on-Si HEMTs

Dynamic-Ron in Small and Large C-doped AlGaN/GaN-on-Si HEMTs
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小型和大型 C 掺杂 AlGaN/GaN-on-Si HEMT 中的动态 Ron

DOI:
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发表时间:
2016
期刊:
影响因子:
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通讯作者:
M. Kuball
M. Kuball
中科院分区:
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文献类型:
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作者:
S. Karboyan;M. Uren;Sara Martin Horcajo;J. Pomeroy;I. Chatterjee;P. Moens;A. Banerjee;M. Caesar;M. Kuball

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我们报告了动态Ron随非状态应力时间的增加而增加,仅在bbb300s后达到饱和。我们表明,在小型设备中观察到广泛的动态Ron行为,而大型设备在小型设备上表现出平均的行为特征。这种行为可以用几十微米的优先垂直泄漏路径来解释。在一些晶圆中观察到长时间的恒定色散,但在下一代外延中这种色散被抑制。
We report that dynamic Ron can increase with off-state stress time, only saturating after >300s. We show that a wide range of dynamic Ron behaviors is observed in small devices whereas large devices show behavior characteristic of an average over the small devices. This behavior can be explained by preferential vertical leakage paths separated by tens of microns. Long time constant dispersion is observed in some wafers but this is suppressed in later generation epitaxy.
DOI: 10.1109/ted.2012.2216535
发表时间: 2012-12-01
影响因子: 3.1
作者:
Uren, Michael J.;Moereke, Janina;Kuball, Martin
通讯作者: Kuball, Martin
DOI: 10.1063/1.4885695
发表时间: 2014-06-30
影响因子: 4
作者:
Uren, Michael J.;Caesar, Markus;Kuball, Martin
通讯作者: Kuball, Martin