Surface changes of solids under intense EUV irradiation using a laser-plasma source
Surface changes of solids under intense EUV irradiation using a laser-plasma source
复制标题
使用激光等离子体源在强烈 EUV 照射下固体的表面变化
DOI：
--
复制
发表时间：
2009
期刊：
影响因子：
--
通讯作者：
M. Szczurek
中科院分区：
文献类型：
--
作者：
A. Bartnik;H. Fiedorowicz;R. Jarocki;J. Kostecki;R. Rakowski;M. Szczurek
极端紫外线(EUV)在任何材料中都能被强吸收，只能通过非常薄的薄膜传播。根据辐射通量和材料特性，辐照后的材料表面可以保持不变或以某种方式改变。在某些材料中，表面的变化可能是由于快速熔化或沸腾之后的凝固引起的。在其他情况下，可以进行光化学或光热消融。它需要相对较高的辐射通量，数量级为几十MJ/cm2。基于配备了适当光学元件的喷气靶的激光等离子体EUV源可以提供这样的条件。在这项工作中，使用椭球掠入射收集器聚焦了来自氙气或氪等离子体的EUV辐射。不同种类的材料样品在焦平面内或在焦平面后一定距离处被照射。用这种方法对样品进行不同强度的辐照。照射的重复频率为10 Hz，照射时间从1s到2min不等。用扫描电子显微镜观察了辐照后的表面形貌。在某些材料的情况下，焦平面上的EUV强度足以进行消融。在其他情况下，材料烧蚀是不可能的，但表面结构被改变了。特定材料的结构形式既取决于单次发射的EUV通量，也取决于发射次数。
Extreme ultraviolet (EUV) is strongly absorbed in any material and can be transmitted only through very thin foils. The material surface after irradiation can remain unchanged or becomes modified in some way depending on radiation fluence and material properties. In some materials the surface changes may arise due to fast melting or boiling followed by solidification. In other cases photochemical or photothermal ablation can occur. It requires relatively high radiation fluence of the order of tens mJ/cm2. A laser-plasma EUV source based on a gas puff target equipped with a proper optic can deliver such conditions. In this work EUV radiation coming from xenon or krypton plasma was focused using an ellipsoidal grazing incidence collector. Different kind of material samples were irradiated in the focal plane or at some distance behind the focal plane. This way different intensities were applied for irradiation of the samples. Irradiation was performed with 10 Hz repetition rate and different time duration varying from 1s to 2 min. Surface morphology after irradiation was investigated using a scanning electron microscope. In a case of some materials EUV intensity in the focal plane was sufficient for ablation. In other cases material ablation was not possible but surface structure was modified. Forms of the structures for a certain material depend both on EUV fluence in a single shot and the number of shots.
影响因子：
14
作者：
Yim, EKF;Reano, RM;Leong, KW
通讯作者：
Leong, KW