OBSERVER-BASED CONTROL OF A DUAL-STAGE PIEZOELECTRIC SCANNER.
OBSERVER-BASED CONTROL OF A DUAL-STAGE PIEZOELECTRIC SCANNER.
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基于观察者的双级压电扫描仪控制。
DOI：
10.1115/dscc2019-9163
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发表时间：
2019
期刊：
影响因子：
--
通讯作者：
S. Andersson
中科院分区：
文献类型：
--
作者：
Yuhe Chang;S. Andersson
尽管原子力显微镜（AFM）在广泛的应用中取得了成功，但其缓慢的成像速度仍然受到限制。克服这一挑战的一种方法是依靠算法方法来减少成像时间，不是通过扫描更快，而是通过扫描更少。这种方案在较旧的仪器上特别有用，因为它们可以提供显著的增益，尽管现有的（缓慢的）硬件。同时，当与可改装到系统中的先进扫描仪相结合时，子采样算法可以产生更大的成像率改进。在这项工作中，我们专注于使用双级压电扫描仪以及称为局部圆形扫描（LCS）的特定扫描算法。LCS沿着圆形轨迹驱动AFM的尖端，同时使用反馈将该圆圈居中于样品边缘并沿着特征移动圆圈，从而通过将样品集中到感兴趣的区域来减少成像时间。双级系统非常适合LCS，因为该算法自然地被描述为高频、短程路径（扫描圈）和较慢、长距离路径（沿着样本的轨迹）。然而，由于系统是多输入，单输出，扫描仪的控制并不简单。在这里，我们建立了扫描级的可控性和可观察性，允许我们通过分离原理为远程和短程执行器开发单独的控制器。然后，我们使用一个内部模型控制器用于短程执行器来跟踪正弦输入（以产生圆周运动），并使用一个状态空间设定点跟踪控制器用于长距离执行器。通过仿真验证了结果。
Despite its proven success in a wide variety of applications, the atomic force microscope (AFM) remains limited by its slow imaging rate. One approach to overcome this challenge is to rely on algorithmic approaches that reduce the imaging time not by scanning faster but by scanning less. Such schemes are particularly useful on older instruments as they can provide significant gains despite the existing (slow) hardware. At the same time, algorithms for sub-sampling can yield even greater improvements in imaging rate when combined with advanced scanners that can be retrofitted into the system. In this work, we focus on the use of a dual-stage piezoelectric scanner coupled with a particular scanning algorithm known as Local Circular Scan (LCS). LCS drives the tip of the AFM along a circular trajectory while using feedback to center that circle on a sample edge and to move the circle along the feature, thus reducing imaging time by concentrating the samples to the region of interest. Dual-stage systems are well-suited to LCS as the algorithm is naturally described in terms of a high-frequency, short range path (the scanning circle) and a slower, long range path (the track along the sample). However, control of the scanner is not straightforward as the system is multi-input, single-output. Here we establish controllability and observability of the scanning stage, allowing us to develop individual controllers for the long-range and short-range actuators through the principle of separation. We then use an internal model controller for the short range actuator to track a sinusoidal input (to generate the circular motion) and a state-space set-point tracking controller for the long range actuator. The results are demonstrated through simulation.
影响因子：
1.6
作者：
Huang, Peng;Andersson, Sean B.
通讯作者：
Andersson, Sean B.