Laser Chemical Machining with High Process Pressure
Laser Chemical Machining with High Process Pressure
复制标题
高加工压力的激光化学加工
DOI：
10.1002/phvs.202100003
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发表时间：
2021
期刊：
影响因子：
--
通讯作者：
Simons
中科院分区：
文献类型：
--
作者：
Simons
此外，工艺压力的增加对激光化学腔的特性没有影响。在高工艺压力下产生的空腔在形状精度和表面粗糙度方面与在环境工艺压力下产生的空腔相当，见图3和图4。如上所述，工艺窗口的加宽是由于电解液沸腾过程的减少。通过减小气泡直径和减小气泡与工件的粘附时间，对激光诱导的电解液沸腾过程进行了描述。电解液的沸腾温度随着工艺压力的增加而升高，使电解液沸腾过程最小化。如图3所示，工艺窗口随着工艺压力的增大而增大。过程压力的增加允许激光化学过程在增加的激光功率下进行。由于去除率与工件表面温度之间存在相关性，而工件表面温度直接由施加的激光功率决定，因此去除率随激光功率的增加而增加。通过将工艺压力增加到6bar（最大）。激光功率：2.2 W)，与机械加工相比，去除率可提高2.46倍。为了满足对所生产部件的复杂性和多功能性日益增长的要求，所谓的非常规加工工艺正在得到发展，其中包括激光化学加工（LCM）。激光化学加工是利用激光诱导的电解液溶液与金属表面之间的非均相化学反应的热活化效应去除材料的一种表面处理方法。激光化学加工依赖于激光辐射、材料和电解液界面温度的升高。LCM过程的质量在很大程度上取决于由于局部过热而在相互作用区沸腾。由此产生的激光诱导沸腾气泡，如图2所示，粘附在工件表面并将其屏蔽。激光辐射从光致密介质（电解质溶液）到光薄介质（沸腾气泡）的转变引起激光辐射的偏转[4]。附着的气泡作为散射中心，偏转部分入射激光辐射，导致去除质量的降低，在表面质量，形状精度等方面。
Furthermore, it can be stated that the increase in process pressure has no effect on the characteristics of the laser chemical cavities. The resulting cavities at elevated process pressures are comparable in terms of shape accuracy and surface roughness to the resulting cavities at ambient process pressure, see Fig. 3 and 4. As mentioned above, the widening of the process window is due to the reduction of the electrolyte solution boiling process. This reduction of the laser-induced electrolyte solution boiling process is described in particular by the reduction of the gas bubble diameters as well as the adhesion time of the gas bubbles to the workpiece surcess pressure was chosen. the boiling temperature of the electrolyte solution rises with an increase of the process pressure, which minimizes the electrolyte solution boiling process. As shown in Fig. 3, the process window increases with increasing process pressure. The increase of the process pressure allows the laser chemical process to be performed at increased laser power. Due to the correlation between removal rate and surface temperature of the workpiece, which is directly determined by the applied laser power, the removal rate increases with increased laser power. By increasing the process pressure to 6 bar (max. laser power: 2.2 W), the removal rate could be increased by a factor of 2.46 compared to machiningIn order to meet the increasing demands on complexity and multifunctionality of the components to be produced, so-called non-conventional machining processes are being developed [1], including laser chemical machining (LCM). Laser chemical machining is a surface treatment that removes material by the effect of laser induced thermal activation of heterogenous chemical reactions between the electrolyte solutions and a metallic surface [2]. Laser chemical machining depend on raised temperature at the interface of laser radiation, material, and electrolyte solution to function. The quality of the LCM process is largely determined by boiling in the interaction zone due to local overheating [3]. The resulting laser-induced boiling bubbles, see Fig. 2, adhere to the workpiece surface and shield it. The transition of the laser radiation from an optically dense medium (electrolyte solution) to an optically thin medium (boiling bubble) causes a deflection of the laser radiation [4]. The adhering gas bubbles act as scattering centers which deflect part of the incident laser radiation, resulting in a reduction of the removal quality, in terms of surface quality, shape accuracy etc.
金属激光化学微加工中的动态过程行为
影响因子：
3.2
作者：
S. Mehrafsun;H. Messaoudi
通讯作者：
H. Messaoudi