Research on the Time Drift Stability of Differential Inductive Displacement Sensors with Frequency Output.
Research on the Time Drift Stability of Differential Inductive Displacement Sensors with Frequency Output.
复制标题
频率输出差动式电感位移传感器时间漂移稳定性研究
DOI：
10.3390/s22166234
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发表时间：
2022-08-19
期刊：
影响因子：
3.9
通讯作者：
Zhang, Yong
中科院分区：
文献类型：
--
作者：
Lu, Xiaolong;Tian, Guiyun;Wang, Zongwen;Li, Wentao;Yang, Dehua;Li, Haoran;Wang, You;Ni, Jijun;Zhang, Yong
关键词：
边缘位移传感器是建造大型分块镜天文光学望远镜的关键技术之一。数字接口是传感器技术、数字化转型和物联网（IoT）的一种新方法。频率输出传感器和电感数字转换器（LDC）与传统的传感器相比，具有显着的优势与模数转换器（ADC）接口。为了使差分感应频率输出位移（DIFOD）传感器满足拼接镜天文望远镜的高稳定度要求，必须了解影响传感器时漂的因素。本文重点研究了传感器结构和材料、信号调理和接口以及用于永久安装应用的时间漂移固定装置等关键因素。首先分析了传感器的测量原理和探头结构特点。然后，实现了两种利用谐振电路和LDC芯片的信号调理和数字化方法，并进行了比较。最后，对采用不同信号调理方法和夹具的传感器进行了温度控制下的时漂稳定性实验。实验结果表明，磁屏蔽环有效地提高了传感器的灵敏度和品质因数，基于谐振电路的信号调理传感器的时漂稳定性优于基于LDC芯片的传感器，传感器时漂均方根（RMS）满足0.01 μm/24 h的要求。这项研究将有助于进一步开发高稳定性的频率输出传感器和基于物联网的系统，以便在未来扩大应用。
An edge displacement sensor is one of the key technologies for building large segmented mirror astronomical optical telescopes. A digital interface is one novel approach for sensor technologies, digital transformation and the Internet of Things (IoT) in particular. Frequency output sensors and inductance-to-digital converter (LDC) demonstrated significant advantages in comparison with conventional sensors with analog-to-digital converter (ADC) interfaces. In order for the differential inductive frequency output displacement (DIFOD) sensor to meet the high-stability requirements of segmented mirror astronomical telescopes, it is important to understand the factors for time drift of the sensor. This paper focuses on the investigation of key factors of sensor structure and material, signal conditioning and interface, and fixtures for time drift to permanently installed applications. First, the measurement principle and probe structural characteristics of the sensor are analyzed. Then, two kinds of signal conditioning and digitalization methods using resonance circuits and LDC chips are implemented and compared. Finally, the time drift stability experiments are performed on the sensors with different signal conditioning methods and fixtures under controlled temperature. Experimental results show that the magnetic shield ring effectively improves the sensitivity and quality factor of the sensors, the time drift stability of the sensor using the signal conditioning based on resonance circuits is better than that of the sensors using LDC chips, and the root mean square (RMS) of the sensor time drift meets the requirement of 0.01 μm/24 h. This study will help further development of high-stability of frequency output sensors and IoT-based systems for scaled-up applications in the future.
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DOI：
10.1109/tuffc.2019.2940451
发表时间：
2020-01-01
影响因子：
3.6
作者：
Mariani, Stefano;Heinlein, Sebastian;Cawley, Peter
通讯作者：
Cawley, Peter
影响因子：
4.3
作者：
Sandra, K. R.;Kumar, A. S. Anil;Kumar, V. Jagadeesh
通讯作者：
Kumar, V. Jagadeesh
影响因子：
3.3
作者：
Tian, GY;Zhao, ZX;Corcoran, P
通讯作者：
Corcoran, P
影响因子：
5.6
作者：
Zhang, Weipeng;Wang, Chenglong;Zhang, Huayu
通讯作者：
Zhang, Huayu
基于边缘和尖端传感的分段镜的主动维护
影响因子：
1.9
作者：
Wang, Bin;Dai, Yichun;Xu, Fangyu
通讯作者：
Xu, Fangyu