Self-calibrating hybrid wavelength, polarization, and time-multiplexed heterodyne interferometers for Angstrom precision measurements
Self-calibrating hybrid wavelength, polarization, and time-multiplexed heterodyne interferometers for Angstrom precision measurements
复制标题
用于埃级精密测量的自校准混合波长、偏振和时分复用外差干涉仪
DOI：
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发表时间：
2006
期刊：
影响因子：
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通讯作者：
F. Ghauri
中科院分区：
文献类型：
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作者：
N. Riza;M. Arain;F. Ghauri
Propose here unique wavelength and hybrid wavelength-polarization and wavelength-polarization-time-multiplexed heterodyne optical interferometers using an internal self-referencing scheme enabling Angstrom level sensitivity optical path-length measurements. As a first step, a proof-of-concept wavelength multiplexed scanning heterodyne interferometer is built to test the surface quality of a test mirror, demonstrating ±100 A profile variations with a 0.9 A accuracy. The hybrid wavelength-polarization and wavelength-polarization-time-multiplexed interferometers can be used to form spectrally coded distributed sensors.
相移干涉仪/椭偏仪能够测量测试表面的复杂折射率和表面轮廓。
DOI：
10.1364/josaa.15.000538
发表时间：
1998
期刊：
Journal of the Optical Society of America. A, Optics, image science, and vision
影响因子：
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作者：
Rogala,EW;Barrett,HH
通讯作者：
Barrett,HH