The large response current of a vacuum pressure sensor based on a vertically-aligned ZnO nanowires array
The large response current of a vacuum pressure sensor based on a vertically-aligned ZnO nanowires array
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基于垂直排列ZnO纳米线阵列的真空压力传感器的大响应电流
DOI：
10.1039/c6ra18433b
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发表时间：
2016-12
期刊：
影响因子：
3.9
通讯作者：
Zhang Tong
中科院分区：
文献类型：
--
作者：
Wang Ding;Zheng Xuejun;Cao Xinchao;Wang Xianying;Zhang Tong
采用化学气相沉积法制备了垂直排列的ZnO纳米线阵列（VA-ZnO-NWs），并将其用于真空压力传感器的制作，利用半导体参数测试仪对其敏感特性进行了测试。该传感器的响应电流比以前基于ZnO纳米带（NBs）薄膜、ZnO单NW和p-ZnO纳米线的传感器的响应电流大。在对数坐标系中，电阻-真空度曲线呈线性关系。真空压力的测量范围为10−5至103 mbar，功耗范围为102至103 μW，与传统的真空压力传感器相比，范围更宽，功耗更低。利用真空度变化的电流-时间曲线研究了该传感器的响应速度和重复性。利用氧的化学吸附和独特的纳米线阵列结构探讨了其敏感机理，以理解VA-ZnO-NWs阵列传感器的大响应电流和高灵敏度。ZnO纳米线的大表面积上吸附的氧可以在表面形成电子耗尽层，其独特的大表面积体积比的纳米线阵列结构为电子输运提供了丰富的载流子通道。
A vertically-aligned ZnO nanowires (VA-ZnO-NWs) array was prepared via chemical vapor deposition, which was used to fabricate a vacuum pressure sensor and its sensitive characteristics were measured using a semiconductor parameter tester. The response currents are larger than those of the previous sensors based on ZnO nanobelts (NBs) film, ZnO single NW and p-ZnO nanowires. There is a linear relationship in the resistance–vacuum pressure curve of the logarithmic coordinate system. The measurement of the vacuum pressure is in the range of 10−5 to 103 mbar and the power consumption is in the range of 102 to 103 μW, which is wider and much lower, respectively, compared with the traditional vacuum pressure sensors. The current–time curve of the vacuum pressure variation was used to study the response speed and repeatability. The sensitive mechanism is discussed using oxygen chemisorption and the unique NWs array structure to understand the large response current and high sensitivity of the VA-ZnO-NWs array sensor. The adsorbed oxygen on the large surface area of the ZnO NWs can form an electron depletion layer on the surface, and the unique NWs array structure with large surface-to-volume ratio provides abundant carrier channels for electronic transport.
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影响因子：
1.6
作者：
Schlenker, E.;Bakin, A.;Waag, A.
通讯作者：
Waag, A.
影响因子：
4.3
作者：
J. She;J. Yeow
通讯作者：
J. She;J. Yeow
影响因子：
5.1
作者：
Li Jinfeng;Tang Zhen-an
通讯作者：
Li Jinfeng;Tang Zhen-an
DOI：
10.1002/chin.201234191
发表时间：
2012-08
期刊：
ChemInform
影响因子：
--
作者：
Y. Long;Miao Yu;B. Sun;C. Gu;Zhi-Yong Fan
通讯作者：
Y. Long;Miao Yu;B. Sun;C. Gu;Zhi-Yong Fan
影响因子：
10.8
作者：
Jie, J. S.;Zhang, W. J.;Lee, S. T.
通讯作者：
Lee, S. T.