Adaptive delay lines implemented on a photonics chip for extended-range, high-speed absolute distance measurement

Adaptive delay lines implemented on a photonics chip for extended-range, high-speed absolute distance measurement
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在光子芯片上实现的自适应延迟线,用于扩展范围、高速绝对距离测量

DOI:
10.1117/12.2647526
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发表时间:
2023
期刊:
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影响因子:
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通讯作者:
Coggrave C
Coggrave C
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作者:
Coggrave C

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高速(超过105座标s-1)和远距离(~10米)绝对距离测量应用基于频率扫描干涉测量(FSI)产生非常高的调制频率(通常>100 GHz)由于激光扫频率和参考和目标臂之间的大不平衡。由于在这些信号频率上采样的成本极高,这种系统目前是不切实际的。自适应延迟线(ADL)最近被提出作为平衡干涉仪的一种解决方案,因此可以将采样率要求降低2N倍,其中2N是ADL中的开关数量[1,2]。该技术已经在实验室中使用大块光学和光纤配置成功地进行了演示,尺寸和成本的进一步减小将增加计量应用的广度。硅光子学构成了一个有效的平台,可以将adl小型化到芯片规模,简化仪器制造,并提供比体光学和基于光纤的解决方案更强大的配置。本文讨论了利用基于加热器的光开关、多模干涉仪(MMI)耦合器和Mach-Zehnder干涉仪(MZI),在绝缘体硅(SOI)光子学平台上设计和制造芯片级adl。我们还建立了串联的4个开关的加热器电压,需要在参考臂中切换光路,这是使用该设备进行FSI范围测量的必要步骤。
High-speed (upwards of 105coordinates s-1) and long-range (~10 m) absolute distance measurement applications based on frequency scanning interferometry (FSI) generate very high modulation frequencies (typically >100 GHz) due to the laser frequency sweep rate and the large imbalance between the reference and object arms. Such systems are currently impractical due to the extremely high cost associated with sampling at these signal frequencies. Adaptive delay lines (ADLs) were recently proposed as a solution to balance the interferometer and therefore reduce sampling rate requirements by a factor of 2N, whereNis the number of switches in the ADL [1, 2]. The technique has been successfully demonstrated in the lab using bulk optics and optical fiber configurations, and further reduction in size and cost will increase the breadth of metrology applications that can be addressed. Silicon photonics constitute an effective platform to miniaturize ADLs to chip-scale, simplifying instrument manufacture and providing a more robust configuration compared to bulk-optics and fiber-based solutions. We discuss the design and fabrication of chip-scale ADLs on a silicon on insulator (SOI) photonics platform, using optical switches based on heaters, multi-mode interferometer (MMI) couplers and Mach-Zehnder interferometers (MZI). We also establish the heater voltages of 4 switches in series, required to switch the optical path in the reference arm, a necessary step to use the device for FSI range measurements.
基石。
DOI: 10.1126/science.124.3224.657
发表时间: 1956
期刊: Science
影响因子: 56.9
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使用具有宽调谐范围的钛蓝宝石激光器进行波长扫描干涉测量
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