Confirmation of electric properties of traps at silicon-on-insulator (SOI)/buried oxide (BOX) interface by three-dimensional-device simulation
Confirmation of electric properties of traps at silicon-on-insulator (SOI)/buried oxide (BOX) interface by three-dimensional-device simulation
复制标题
通过三维器件模拟确认绝缘体上硅 (SOI)/埋氧层 (BOX) 界面陷阱的电特性
DOI:
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发表时间:
2004
期刊:
影响因子:
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通讯作者:
Y.Nakajima
中科院分区:
文献类型:
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作者:
Y.Nakajima
影响因子:
1.5
作者:
Y. Nakajima;H. Tomita;K. Aoto;Nobuhiro Ito;T. Hanajiri;T. Toyabe;T. Morikawa;T. Sugano
通讯作者:
T. Sugano