New Technique for Suppressing Oxygen Impurity in AlGaAs Layer during Molecular Beam Epitaxy by Surface Segregation
New Technique for Suppressing Oxygen Impurity in AlGaAs Layer during Molecular Beam Epitaxy by Surface Segregation
复制标题
通过表面偏析抑制分子束外延过程中AlGaAs层中氧杂质的新技术
DOI:
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发表时间:
2005
期刊:
影响因子:
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通讯作者:
T.Nishinaga
中科院分区:
文献类型:
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作者:
S.Naritsuka;O.Kobayashi;K.Mitsuda;T.Nishinaga
影响因子:
1.5
作者:
S. Naritsuka;K. Yamanaka;M. Mannoh;M. Mihara;M. Ishii
通讯作者:
M. Ishii