Effect of intermediate layer on wear-delamination life of low-frictional SiC-2.6mass%Ti film sputter-deposited on titanium substrate
Effect of intermediate layer on wear-delamination life of low-frictional SiC-2.6mass%Ti film sputter-deposited on titanium substrate
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效果%20of%20中间%20层%20on%20磨损分层%20life%20of%20低摩擦%20SiC-2.6mass%Ti%20film%20sputter-deposited%20on%20titanium%20substrate
DOI：
10.1016/j.surfcoat.2010.09.051
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发表时间：
2010
影响因子：
5.4
通讯作者：
K. Nakasa
中科院分区：
文献类型：
--
作者：
J. Zheng;Masahiko Kato;K. Nakasa
为了防止摩擦系数很低(约0.05)的碳化硅-2.6%钛薄膜的早期磨损剥落，在钛衬底上溅射沉积了五种类型的中间层(i-ls)，并用球盘式磨损试验机对这些试件进行了测试。当I-L膜厚度小于0.4μm时，Ti、SiO_2和Si(Ti)O_2 I-L膜的溅射沉积使SiC-2.6%Ti顶膜的分层寿命增加到恒定值，而TiO_2O_1-L膜的I-L膜的分层寿命降低。对于Si C-3.6%Ti i-L，随着i-L厚度的增加，顶膜的分层寿命延长，当i-L厚度大于0.2μm时，其寿命比Ti、SiO_2和Si(Ti)O_2I-L的要长。对于Ti i-L，分层发生在顶膜/i-L界面，而对于SiO_2、Si(Ti)O_2和SiC-3.6%Ti I-L，在磨损到达顶膜/i-L界面之前，则是沿I-I-L界面发生。I-L的存在增加了薄膜的分层寿命，这是由于顶膜/I-L和I-L/衬底界面的界面强度增加所致。对于SiC3.6%TiI-L，残余压应力的产生似乎是导致分层寿命提高的主要原因。
In order to prevent an early wear delamination of the SiC-2.6%Ti film that has a very low friction coefficient of about 0.05, five types of intermediate layers (I-Ls) were sputter-deposited on a Ti substrate, and these specimens were then tested using a ball-on-disk type wear test machine. The sputter deposition of the I-Ls of Ti, SiO2, and Si(Ti)O2increases the delamination life of the SiC-2.6%Ti top-film to a constant value when the I-L thickness is smaller than 0.4μm, whereas that of the TiO2I-L decreases the delamination life. For the SiC-3.6%Ti I-L, the delamination life of the top-film increases with increasing I-L thickness and it is longer than those for the Ti, SiO2and Si(Ti)O2I-Ls when the I-L thickness is more than 0.2μm. The delamination occurs along the top-film/I-L interface for the Ti I-L, but along the I-L/substrate interface for the SiO2, Si(Ti)O2and SiC-3.6%Ti I-Ls before the wear reaches the top-film/I-L interface. The increase in the delamination life by the existence of the I-L is due to the increase in the interfacial strength of both top-film/I-L and I-L/substrate boundaries. For the SiC-3.6%Ti I-L, the generation of residual compressive stress seems to be the main reason for the increase in the delamination life.
重复滑动载荷下SiC薄膜的磨损和分层行为
DOI：
--
发表时间：
2007
期刊：
Key Engineering Materials 345-346
影响因子：
--
作者：
K. Nakasa;M. Kato;J. Zheng
通讯作者：
J. Zheng
高频磁控管同时溅射法形成SiC-Ti和SiC-Al薄膜的摩擦磨损特性
DOI：
--
发表时间：
2005
期刊：
日本機械学会論文集(A編) 71・702
影响因子：
--
作者：
加藤昌彦;中佐啓治郎;鄭 錦華;廣田悟史
通讯作者：
廣田悟史